Mask manufacturing device and manufacturing method

Abstract

The invention discloses a mask making device, which includes: a stretching module for stretching a mask and transferring the mask to a mask frame; a mask detection module for detecting whether the mask strip is Position information on the mask frame; a mask fixing module, used to fix the mask on the mask frame; a first displacement measurement module, used to measure the stretching module and the mask The location information of the fixed module. The position information of the mask detection module is accurately determined by the first displacement measurement module, and the actual position of the mask can be obtained more accurately, so that the mask can be moved to the preset position more accurately by adjusting the tension and displacement of the stretching module position, thereby improving the position accuracy of the mask relative to the mask frame; and accurately determining the position information of the mask fixing module through the first displacement measurement module, improving the fixing accuracy of the mask fixing module to the mask and the mask frame, thereby The manufacturing precision of the metal mask is improved.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a mask manufacturing device and a manufacturing method. Background technique [0002] At present, the evaporation method used on all OLED mass production machines is horizontal evaporation, and a mask must be used in the OLED evaporation process. The method of manufacturing the mask plate can be roughly divided into two categories, which are respectively stretching the net in strips and stretching the whole net together. Strip-stretching is to apply a certain tension to the mask strips, and then install the mask strips on the mask frame one by one to form a mask plate. [0003] A high-precision metal mask (Fine Metal Mask, FMM) has been widely used due to its high meshing precision. In the existing FMM manufacturing equipment, due to the limitation of equipment structure and measurement means, the manufacturing accuracy of FMM stays at the level above 2μm-3μm, and it ...

AI Technical Summary

Problems solved by technology

In the existing FMM production equipment, due to the limitations of the equipment structure and measurement methods, the production accuracy of FMM stays at the level of 2μm-3μm or more, and it is difficult to further improve the production accuracy of the metal mask

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