Photosensitive member, process for its production image, forming apparatus having photosensitive member and image forming process
A technology for photosensitive parts and images, which is applied in semiconductor/solid-state device manufacturing, optics, electrical components, etc., and can solve problems such as scratching photosensitive parts
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[0115] The invention is further illustrated by the examples listed below.
example 1
[0117] use figure 2 In the plasma-enhanced CVD system, a lower barrier layer and a photoconductive layer were deposited on a cylindrical aluminum substrate under the conditions shown in Table 1, and a surface layer was sequentially formed thereon under the conditions shown in Table 2. Among them, changing the flow rate of hydrogen gas and the high-frequency power supply produces five photosensitive components A-E, whose surface layers have different spin densities and spin relaxation times. The spin density and spin relaxation time values of the formed films are shown in Table 6.
[0118] Table 1
[0119] Conditions for producing photosensitive components
[0120] (lower barrier layer, photoconductive layer)
[0121] Lower barrier
[0122] SiH 4 260 sccm
[0123] h 2 500 sccm
[0124] NO 7 sccm
[0125] B 2 h 6 2100ppm
[0126] ...
example 1
[0139] CH 4100 sccm
[0140] h 2 variable
[0141] power variable
[0142] Frequency 13.56MHz
[0143] Internal pressure 0.4 Torr
[0144] Layer thickness 0.1μm
[0145] The five drums prepared in the above manner were mechanically rubbed against their surfaces with a certain intensity for the service life test of the copier, and thereafter, their performance after being installed in the copier and used for a long time was evaluated. First, the drum was rotated at a process speed of 400 mm / sec, and a polished SiC belt (LT-C2000, available from Fuji Photo Fim Co., Ltd.) having an average particle diameter (8 μm) was substantially equal to that of bringing the toner into contact with it. section, which then holds down a parallel pivot of 3mm diameter and 20mm width, which rubs against the drum surface under load application. Also, the polishing belt is always moved at a speed of 1mm / Sec, so as to always...
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Abstract
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