Preparation method of titanium-aluminum alloy target

Abstract

The invention discloses a method for preparing a titanium-aluminum alloy target, which includes: weighing titanium raw materials and aluminum raw materials, dividing the titanium raw materials into first titanium raw materials and second titanium raw materials, and dividing the aluminum raw materials into first aluminum raw materials and second titanium raw materials. The second aluminum raw material; the first titanium raw material and the first aluminum raw material are placed in a water-cooled copper crucible and smelted to obtain the first melt; the first melt is cooled to obtain the first ingot; the first ingot is placed in the water-cooled copper crucible bottom, and add a second titanium raw material and a second aluminum raw material for smelting to obtain a second melt; cool the second melt to obtain a second ingot; heat the second ingot until it is completely melted, refine it, and quickly cast it to obtain a target. The target blank is packaged, degassed, hot isostatically pressed, and finally sintered to obtain a sintered body; the sintered body is taken out of the package and then machined to obtain a titanium-aluminum alloy target. The invention adopts a step-by-step smelting method, which can solve the technical problems such as a large number of shrinkage cavities, porosity and other defects in the preparation of titanium-aluminum alloy target materials in the prior art.

Description

Technical field [0001] The invention relates to the technical field of preparing high-performance target materials, and in particular to a method for preparing titanium-aluminum alloy targets. Background technique [0002] Titanium-aluminum alloy targets are mainly used in the tool coating industry. Targets are generally manufactured by smelting, hot pressing or isostatic pressing. Among them, smelted targets have better alloying, while hot-pressed targets have lower costs but low density. , Hot isostatic pressing targets have the advantage of high density and can be mass produced. During the use of the target, reactive sputtering is generally carried out in an environment such as nitrogen or acetylene to form a coating. Titanium aluminum N, CrN, and titanium aluminum CrN are new hard coating materials developed in recent years. Titanium-aluminum N-coated blades have been commercialized. It has good chemical stability and anti-oxidation wear performance. When using it to ...

AI Technical Summary

Problems solved by technology

[0007] In view of the deficiencies of the existing technology, a method for preparing a titanium-aluminum alloy target that can effectively solve the problem of uneven composition and low purity of the alloy target is urgently needed in the industry.