Device and method for carrying out wafer positioning detection

Abstract

The invention discloses a device for carrying out wafer positioning detection, which comprises a wafer box and a detection unit positioned on one side of the wafer box, wherein the wafer box is provided with a loading table for bearing a wafer from top to bottom; the detection unit comprises a controller, a detection frame, and a sliding rail, a laser ranging sensor, a laser baffle, a detection cover and a wafer scanning sensor which are located in the detection frame; the wafer scanning sensor and the laser baffle are fixed on the detection cover, and the laser ranging sensor is fixed on one side of the detection frame; the detection cover moves up and down along the sliding rail; and the laser ranging sensor, the laser baffle and the wafer scanning sensor are connected to a controller. According to the wafer positioning detection device and method, the position of the wafer in the wafer box can be rapidly and accurately determined, and the whole detection device is small in occupied area and easy and convenient to install.

Description

technical field [0001] The invention relates to the field of wafer positioning, in particular to a device and method for wafer positioning detection. Background technique [0002] Today, with the rapid development of factory automation, in the wafer processing plant, the handling, picking and placing of wafer boxes has been automated. Loadport (wafer loading port), or foupopener (wafer box carrier), is an OEM tool manufacturing Manufacturers provide an OEM configurable automatic wafer handling solution, which allows OEMs to configure the various needs of end users on their existing platforms. The tool conforms to the FOUP (Front Opening Unified Pod, wafer transfer box) interoperability standard and can be used as a key interface between IFE and the automatic material handling system or manual loading system of the wafer processing plant. It is suitable for the semiconductor wafer manufacturing process and can meet the requirements of the future Factory automation needs incl...

AI Technical Summary

Problems solved by technology

[0004] The wafer positioning monitoring device in the prior art usually uses an encoder or a grating tape. For example, in the comparative document CN104637839B, the sensor detection output signal and the grating ruler output signal are processed to accurately detect the wafer placement status in the wafer cassette. Quantity, position and abnormal errors (such as cross-slot placement error, multi-slot placement error, cross-slot placement wafer); however, the accuracy of the positioning method using the grating ruler in this document is poor; in the prior art, the encoder generally cooperates with the motor use, the structure is complicated to install, and the hardware cost is relatively high

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