Single crystal furnace lifting head mass center dynamic balance mechanism

Abstract

The invention discloses asingle crystal furnace lifting headmass center dynamic balance mechanism, wherein the dynamic balance mechanism comprises a single crystal furnace lifting head, a moving roller for winding a tungsten wire rope is arranged in the lifting head mechanism, and a position sensor is arranged opposite to the moving roller; a mass center balancing mechanism is mounted on the side surface of a lifting head thin plate; the mass center balancing mechanism is controlled by an electric control system; a position sensor is arranged on a linear guide rail module; and a changeable balancing weight is arranged on a sliding block which does linear reciprocating motion, and the balancing weight is fixed on the sliding block which does reciprocating motion. The mass center dynamic balance mechanism is mounted on the single crystal furnace lifting head, so that the mass center position deviation of the lifting head caused by the movement of a movable roller is adjusted in real time, and the mass center position of the single crystal furnace lifting head is kept unchanged, so the stability of the tungsten wire rope when a single crystal furnace works is improved, and the quality of produced single crystals is improved.

Description

technical field [0001] The invention relates to the technical field of single crystal furnaces, in particular to a center-of-mass dynamic balance mechanism for a pulling head of a single crystal furnace. Background technique [0002] The single crystal furnace is a kind of equipment that melts polycrystalline materials such as polycrystalline silicon with a heater in an inert gas (mainly nitrogen and helium) environment, and grows a single crystal without dislocation by the Czochralski method. At present, the production scale of the crystal pulling industry is constantly increasing, and artificial crystal materials are constantly developing towards large diameter, high quality, and industrialization. High, high degree of automation, easy to operate and use. As a high-precision crystal growth equipment, its structure must not only meet the necessary strength, stiffness, and stability, but also ensure that the vibration generated by the structure during the single crystal pul...

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Problems solved by technology

[0003] When the single crystal furnace is working, the pulling head lifts the tungsten wire rope, and the moving rollers in the pulling head mechanism need to move at a certain speed at the same time to keep the pulling point of the tungsten wire rope in the same position, which results in the overall center of mass of the pulling head The position changes, so that the stability of the tungsten wire rope and the single crystal produced is poor, which seriously affects the product quality

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