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Metal mask and method of using the same

A metal mask and mask technology, which is applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems of inability to ensure the normal connection between the metal layer and the power supply line, high preparation cost, etc., to avoid The effects of alignment/separation equipment, reduction of preparation costs, and savings in the length of the evaporation chamber and equipment costs

Active Publication Date: 2022-07-29
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The invention provides a metal mask and its use method, which can solve the problem that OLED device preparation in the prior art requires multiple masks, and the preparation cost is relatively high. If a metal mask is used, the metal layer and power supply cannot be guaranteed. The problem of the normal connection of the wiring

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  • Metal mask and method of using the same
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  • Metal mask and method of using the same

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Embodiment Construction

[0032] The following descriptions of the various embodiments refer to the accompanying drawings to illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in the present invention, such as [up], [down], [front], [rear], [left], [right], [inner], [outer], [side], etc., are only for reference Additional schema orientation. Therefore, the directional terms used are for describing and understanding the present invention, not for limiting the present invention. In the figures, units with similar structures are denoted by the same reference numerals, and the dotted lines in the figures indicate that they do not exist in the structure, and only illustrate the shape and position of the structure.

[0033] The present invention aims to solve the problem that the preparation of OLED devices in the prior art requires multiple masks, and the preparation cost is relatively high. If a metal mask cannot ensure the normal connection between th...

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Abstract

Embodiments of the present invention provide a metal mask and a method of using the same. The metal mask includes a metal frame and a mask screen fixed on the metal frame. The mask screen is provided with a groove, and a groove is provided in the groove. There is a photodeformable layer. Under the illumination of the light source, the photodeformation layer deforms and protrudes the groove, which changes the distance between the substrate to be evaporated and the metal mask, and indirectly changes the evaporation of organic materials and metal materials. The area of ​​the film-forming area can be realized by evaporating two film layers successively on one metal mask, which avoids more alignment / separation equipment, greatly saves the length of the vapor deposition cavity and equipment costs, and reduces the preparation cost of OLED devices.

Description

technical field [0001] The invention relates to the technical field of display device manufacturing, in particular to a metal mask and a method for using the same. Background technique [0002] Organic electroluminescence technology is a new type of display technology. The metal mask forms an organic / metal thin film with a certain shape on the surface of the substrate, and forms an OLED device with a multi-layer thin film through continuous deposition of various materials. [0003] In the evaporation process, due to the need to evaporate various functional layers such as organic layer light-emitting layer, inorganic layer, cathode, reflective layer, buffer layer, etc. in the OLED device, generally speaking, considering the problem of metal cathode overlap, organic layer and inorganic layer The metal layer cannot share a metal mask with the metal layer, so the metal mask needs to be replaced more than twice during the entire evaporation process, which makes the evaporation p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 段廷原
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD