MOEMS accelerometer signal extraction device based on light source fluctuation suppression technology

Abstract

The invention provides an MOEMS accelerometer signal extraction device based on a light source fluctuation suppression technology. The MOEMS accelerometer signal extraction device is composed of a piezoelectric excitation module, an MOEMS accelerometer, two sets of optical signal processing loops and a laser closed-loop control loop. Each group of optical signal processing loop comprises a photoelectric detector, a low-noise amplifier, a band-pass filter, an analog demodulator, an A / D converter and an FPGA control algorithm. The laser closed-loop control loop is composed of an FPGA control algorithm, a D / A converter, a laser driving protection circuit and a semiconductor laser. The FPGA control algorithm is composed of a digital demodulator module, a filter module, a multiplier module, a divider module, a scaling module, a PI control module and a signal generator module. The light source intensity component in the output signal is subjected to normalization processing, the light source fluctuation decoupling technology is achieved, and meanwhile the light source intensity closed-loop control method is adopted, so that the influence of light source fluctuation on the output precision is effectively restrained.

Description

technical field [0001] The invention relates to micro-opto-electromechanical systems (MOEMS) and micro-inertial device measurement and control technology, in particular to a MOEMS accelerometer signal extraction device based on light source fluctuation suppression technology. Background technique [0002] MOEMS accelerometer has the advantages of high theoretical accuracy, small size, and strong anti-electromagnetic interference ability, and has been considered as one of the most promising candidates in the field of inertial navigation in recent years. However, the optical weak signals of MOEMS accelerometers are easily affected by various noises and uncertainties of optical parameters, which brings challenges for MOEMS accelerometers to obtain theoretically high-precision signal processing. The research on MOEMS accelerometer signal detection scheme has been an important work in the past two decades. At present, the detection scheme that can take into account the volume, l...

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Problems solved by technology

[0005] In order to solve the above problems, the present invention designs a MOEMS accelerometer signal extraction device based on light source fluctuation suppression technology. The device uses FPGA as the main control chip, adopts the dual modulation mode of two optical signals, and realizes the The decoupling of light source fluctuations solves the problem of low output accuracy of the MOEMS accelerometer due to the existence of light source fluctuations in the prior art

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