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Roll-to-roll continuous coating equipment for vacuum evaporation of liquid raw materials

A liquid raw material, vacuum evaporation technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating and other directions, can solve the problems of expensive raw materials, uneven spraying, high cost, and achieve stable product quality and process repeatability Excellent, high equipment stability effect

Pending Publication Date: 2021-06-15
广东腾胜科技创新有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The traditional method of plating hydrophobic and oleophobic film is mainly spraying method and vacuum evaporation coating method. The spraying method is generally completed in the atmospheric environment, but the probability of crystallization of the liquid liquid medicine is high, the spraying is uneven, and the waste of liquid raw materials is large. It is relatively expensive, resulting in high production costs; the vacuum evaporation coating method mainly uses resistance evaporation (evaporation boat) or electron beam indirect heating, and the active ingredients in the hydrophobic and oleophobic pills that have been prepared in advance are evaporated to the surface by sublimation. The surface of the substrate, but this method cannot achieve continuous coating production, low output and high cost
[0003] The existing continuous coating equipment for vacuum evaporation of liquid raw materials is mainly for the continuous coating production line of sheet substrates, and almost all of these equipment need to be imported from abroad. The price of imported equipment is high, and the product cost is expensive, which cannot meet domestic mass production. Moreover, the substrate width of foreign equipment is relatively narrow, which is not suitable for the continuous coating production of large and wide substrates, especially roll-to-roll flexible substrates.

Method used

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  • Roll-to-roll continuous coating equipment for vacuum evaporation of liquid raw materials
  • Roll-to-roll continuous coating equipment for vacuum evaporation of liquid raw materials
  • Roll-to-roll continuous coating equipment for vacuum evaporation of liquid raw materials

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] Such as figure 1 As shown, a roll-to-roll continuous coating equipment for vacuum evaporation of liquid raw materials, including a vacuum chamber, in which an unwinding mechanism, a coating mechanism, and a winding mechanism are sequentially arranged along the running path of the substrate, and the unwinding mechanism includes an unwinding roller , the winding mechanism includes a winding roller, the coating mechanism includes a liquid raw material evaporation device, and an ion cleaning device, a heater and a plurality of guide rollers are also arranged on the path of the substrate, and the substrate coming out of the unwinding roller passes through multiple A guide roller, a winding roller, the ion cleaning device is used to ion clean the substrate, the heater is used to heat the substrate, and the spraying direction of the liquid raw material evaporation device faces the substrate.

[0034] Such as figure 1 As shown, the vacuum chamber includes an unwinding chamber,...

Embodiment 2

[0044] Such as figure 2 As shown, the difference between this embodiment and Embodiment 1 is that in this embodiment, the coating mechanism further includes a first coating roller, and the liquid raw material evaporation device is located at the first coating roller. The substrate coming out of the unwinding roller passes through the first diaphragm valve, the first coating roller, the second diaphragm valve, and the winding roller in sequence. During the operation of the substrate, the substrate is also guided by multiple guide rollers, and the liquid raw material The evaporating device coats the substrate on the first coating roller.

Embodiment 3

[0046] Such as image 3 As shown, the difference between this embodiment and the second embodiment is that, in this embodiment, a coating source is also provided at the first coating roller. The coating source is magnetron sputtering cathode, evaporation source, arc source or PECVD source. Metal film, dielectric film and other film layers can be plated through the coating source, and the hydrophobic and oil-repellent film and other film layers can be continuously plated on the substrate, which is convenient for coating multi-layer films.

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Abstract

The invention relates to the technical field of vacuum coating equipment, in particular to roll-to-roll continuous coating equipment for vacuum evaporation of liquid raw materials. The roll-to-roll continuous coating equipment comprises a vacuum chamber, and an unwinding mechanism, a coating mechanism and a winding mechanism are sequentially arranged in the vacuum chamber along a base material running path. The unwinding mechanism comprises an unwinding roller, and the winding mechanism comprises a winding roller. The coating mechanism comprises a liquid raw material evaporation device, an ion cleaning device, a heater and a plurality of guide rollers are further arranged on the base material running path, and a base material discharged from the unwinding roller sequentially passes through the multiple guide rollers and the winding roller. The ion cleaning device is used for conducting ion cleaning on the base material, the heater is used for heating the base material, and the spraying direction of the liquid raw material evaporation device faces the base material. According to the roll-to-roll continuous coating equipment for vacuum evaporation of the liquid raw materials, hydrophobic and oleophobic film layers can be continuously plated on the large-breadth base material, the requirement for mass production is met, and the product quality is stable; and a hydrophobic and oleophobic film and other film layers can be continuously plated on the base material, so that a multi-layer film can be conveniently plated.

Description

technical field [0001] The invention relates to the technical field of vacuum coating equipment, in particular to a roll-to-roll continuous coating equipment for vacuum evaporation of liquid raw materials. Background technique [0002] The traditional method of plating hydrophobic and oleophobic film is mainly spraying method and vacuum evaporation coating method. The spraying method is generally completed in the atmospheric environment, but the probability of crystallization of the liquid liquid medicine is high, the spraying is uneven, and the waste of liquid raw materials is large. It is relatively expensive, resulting in high production costs; the vacuum evaporation coating method mainly uses resistance evaporation (evaporation boat) or electron beam indirect heating, and the active ingredients in the hydrophobic and oleophobic pills that have been prepared in advance are evaporated to the surface by sublimation. The surface of the substrate, but this method cannot achie...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/56C23C14/02
CPCC23C14/24C23C14/562C23C14/022
Inventor 朱刚毅朱刚劲朱文廓朱嘉辉杨容军
Owner 广东腾胜科技创新有限公司
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