A system and method for intelligently compensating interference detection with large local surface shape errors

Abstract

A system and method for intelligent compensation interference detection of local large surface shape errors, including a wavefront interferometer, a standard lens, a static compensator, an adaptive optical element, and a surface to be measured. The wavefront interferometer is equipped with a standard lens; the standard lens and the surface to be measured A static compensator and an adaptive optical element are arranged in sequence, the wavefront interferometer is connected to the far-field light intensity data reading device, and the far-field light intensity data reading device reads the far-field light intensity image obtained by the wavefront interferometer and inputs it to the Controller; the controller predicts and outputs the estimated value of the surface shape large error mode aberration fitting coefficient according to the far-field light intensity image; the adaptive optical element aberration control module fits the surface shape large error mode aberration according to the surface to be measured The estimated value of the coefficient generates the driving signal of the adaptive optical element, drives the adaptive optical element to generate compensation aberration, and realizes the intelligent compensation detection of the large error of the surface shape to be measured. The invention improves the processing efficiency of complex optical surface shapes.

Description

technical field [0001] The invention belongs to the technical field of optical surface shape detection, and in particular relates to an interference detection system and method for intelligent compensation of local large surface shape errors. Background technique [0002] The processing of optical parts generally goes through several stages of milling, grinding, and polishing. The grinding stage is the key to determining whether the entire processing can be efficiently converged to high precision. However, the certainty of grinding is far less than that of polishing, especially the local curvature changes of complex optical surfaces make it difficult for the grinding disc to fit the surface to be processed, and it is prone to large local errors, such as common edge collapse or warping , and local pits or protrusions, the corresponding error gradient is too large, resulting in too dense or even invisible interference fringes, far beyond the Nyquist sampling frequency of the d...

AI Technical Summary

Problems solved by technology

However, the calibration of the deflection measurement system itself is also very difficult. The accuracy of the entire interferometry system is limited by the accuracy of the deflection measurement system and the number of drivers. poor form

[0007] In summary, in terms of realizing local large error analysis, existing detection methods cannot be realized based on commercial wavefront interferometers, the detection device has complex structure, high cost, and low detection resolution or detection accuracy

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