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Mask plate manufacturing method and mask plate

A manufacturing method and mask technology, applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve the problems of reducing product yield, mask wrinkles, uneven mask stress, etc.

Pending Publication Date: 2021-06-22
HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the difference in the structure of the film-forming area and the non-film-forming area, the stress on the mask plate will be uneven when stretching the net, resulting in wrinkles and deformation of the mask plate, which will affect the evaporation effect and reduce the product yield.

Method used

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  • Mask plate manufacturing method and mask plate
  • Mask plate manufacturing method and mask plate
  • Mask plate manufacturing method and mask plate

Examples

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Embodiment Construction

[0066] Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided in order to give a thorough understanding of embodiments of the present disclosure.

[0067] In the drawings, the thicknesses of regions and layers may be exaggerated for clarity. The same reference numerals in the drawings denote the same or similar structures, and thus their detailed descriptions will be omitted.

[0068] The described features, structures, or characteristic...

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Abstract

The invention provides a mask plate manufacturing method and a mask plate, and belongs to the technical field of display. The mask plate manufacturing method comprises the steps that a mask substrate is provided, the mask substrate comprises a middle part and edge parts located at the two ends of the middle part, the middle part comprises a first area and at least one second area, and the first area is arranged on the periphery of the second area in a surrounding mode; mesh distribution information of the first area and the second area is determined;according to the mesh distribution information, the mask substrate is etched, a first grid area is formed in the first area, and a second grid area is formed in the second area; and a flexible insulation protection film is formed on the surface of at least one side of the first grid area, wherein the flexible insulation protection film covers the surface of at least one side of the first grid area. The mask plate manufacturing method is helpful for improving the net stretching efficiency and the net stretching flatness of the mask plate. In addition, the mask plate manufacturing method provided by the invention can prevent the mask plate from being scratched and damaging the to-be-evaporated substrate.

Description

technical field [0001] The present disclosure relates to the field of display technology, and in particular to a method for manufacturing a mask and the mask. Background technique [0002] OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) display device, because of its advantages such as self-illumination, high contrast, fast response time, low power consumption, is considered to have the display device with development potential, has become a display technology field. mainstream development direction. [0003] In the manufacturing process of the OLED display panel, it is necessary to vapor-deposit the evaporation materials of each layer on the substrate by using a corresponding mask plate to form each functional layer of the display device. The mask generally includes a film-forming area and a non-film-forming area, and the film-forming area corresponds to the display area of ​​the display panel. Due to the different structures of the film-forming area and...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 潘晟恺李如熊腾青乔永康杨凯
Owner HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD
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