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Method for controlling curvature radius of large-curvature optical element

A technology of radius of curvature and optical components, which is applied in the directions of optical components, optics, and optical devices to reduce production time, improve efficiency, and have a wide range of applications.

Pending Publication Date: 2021-07-02
DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

The invention is applicable to all large curvature radius optical elements

Method used

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  • Method for controlling curvature radius of large-curvature optical element
  • Method for controlling curvature radius of large-curvature optical element
  • Method for controlling curvature radius of large-curvature optical element

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Embodiment Construction

[0021] In order to make the objects and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In the process of film growth, the generation of film stress is inevitable. Membrane stress is usually divided into tensile stress and compressive stress. Usually, the films prepared by dual ion beam sputtering exhibit high compressive stress. The off-line calculation of membrane stress is as follows. attached figure 1 It is the relationship between the substrate diameter, the sagittal height and the radius of curvature and the control principle diagram of the radius of curvature. attached figure 1 As shown in (a), the relationship among substrate diameter, sagittal height and radius of curvature can be expressed as:

[0022]

[0023] whe...

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Abstract

The invention discloses a processing method for accurately controlling the curvature radius of a large-curvature optical element based on film stress. The control method is a method combining a traditional optical processing technology and a coating technology, accurate control over the curvature radius of the optical element can be achieved, particularly, a film is plated on the surface of the optical element through the film stress characteristic, the curvature radius of the element can be changed through film stress, and finally, the purpose of accurately controlling the curvature radius of the optical element is achieved. Meanwhile, the processing method has the advantages that optical elements with different curvature radiuses can be accurately controlled by depositing films with different thicknesses according to the linear relation between the film thickness and the strain on the premise that the optical characteristics of the elements are not affected. The production time can be effectively shortened, and the efficiency is improved.

Description

technical field [0001] The invention belongs to the field of controlling the radius of curvature of an optical element. In particular, it relates to a processing method for precisely controlling the radius of curvature of large-curvature optical elements based on film stress. In particular, the stress characteristics of the film are used to coat the film on the surface of the optical element. The film stress can change the radius of curvature of the element. A new method of coating thin films onto the surface of optical components to precisely control the radius of curvature of the optical components. Background technique [0002] In addition to converging the beam and adjusting the optical path, the optical element with a large radius of curvature (radius of curvature R>1000mm) often plays the role of stabilizing the optical path and improving the output quality of the beam in the optical path system. Therefore, it is used in ring lasers (laser gyroscopes), synchrotron r...

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Application Information

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IPC IPC(8): C23C14/46C23C14/54G02B1/10G01B11/24
CPCC23C14/46C23C14/54G01B11/2441G02B1/10
Inventor 李刚吕起鹏邓淞文刘锐王峰金玉奇
Owner DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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