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A microfluidic stress sensor based on structural metamaterial and its preparation method

A technology of stress sensor and micro-flow channel, which is applied in the direction of micro-structure technology, micro-structure devices, instruments, etc., can solve problems such as the influence of induction characteristics, achieve the effect of reasonable design direction and increase gauge coefficient

Active Publication Date: 2022-07-29
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the microchannel stress sensor has a certain directionality. In the direction of different forces, the resistance change will show the opposite trend, and the intrinsic characteristics of flexible elastic materials lead to the coupling of forces between mutually perpendicular directions. This also leads to the fact that the induction characteristics in the two directions perpendicular to each other will affect each other.

Method used

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  • A microfluidic stress sensor based on structural metamaterial and its preparation method
  • A microfluidic stress sensor based on structural metamaterial and its preparation method
  • A microfluidic stress sensor based on structural metamaterial and its preparation method

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Embodiment 1

[0045] A preparation method of a microfluidic stress sensor based on structural metamaterials, comprising the following steps:

[0046] Step 1. Prepare the flexible superstructure mesh layer. The specific process is: use a laser cutting machine (model Delonghi inducer-6001-N) to laser cut a 50µm-thick polyimide (PI) film to form concave hexagons In which, the length h of the horizontal side is 1.54mm, the width is 1.2mm, the length L of the hypotenuse is 2.4mm, the width is 1.2mm, and the angle between the hypotenuse and the vertical direction are 27°, 33°, 35°, and 45°, respectively, and the obtained flexible superstructure grid layers are named frameA1, frameB1, frame C1, and frame D1, respectively;

[0047] Step 2. Prepare the upper elastic polymer layer and the conductive graphene channel by using a micro-channel mold. The specific process is:

[0048] Step 2.1. Mix the A glue and B glue of Ecoflex0030 according to the volume fraction of 1:1, and stir until the mixture c...

Embodiment 2

[0059] The microchannel stress sensor is prepared according to the steps of the embodiment, and the specific parameters of the flexible superstructure mesh layer in step 1 are adjusted: the angle between the hypotenuse and the vertical direction is 27°, keeping the length ratio of the horizontal side and the hypotenuse unchanged at 1:1.56, when the length h of the hypotenuse is 2.4mm, the width ratio of the horizontal side and the hypotenuse is 1:1 respectively (the widths are 1.2mm and 1.2mm respectively). 1.2mm) and 1:2 (widths are 0.6mm and 1.2mm, respectively), and the obtained flexible superstructure grid layers are named frameA1 and frameA2, respectively. In addition, keep the length ratio unchanged, set the length of the hypotenuse to be 1.2mm, and the width ratio of the horizontal and hypotenuse to be 1:1 (width of 0.6mm and 0.6mm, respectively) and 1:2 (width of 0.6 mm and 1.2mm), named frameA3, frameA4 respectively,

[0060] Other steps remain unchanged, wherein th...

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Abstract

The invention provides a micro-flow channel stress sensor based on structural metamaterials and a preparation method thereof, belonging to the technical field of stress sensor preparation. In the micro-channel stress sensor designed by the present invention, a flexible superstructure grid layer with a concave hexagon is added under the micro-channel of the conventional stress sensor, so that the sensor can realize the resistance change of the device when the sensor is axially stretched. The trend is reversed, which unifies the resistance switching trend of the device in all directions and improves the device's gage factor. And through the design of the cell structure parameters and cell distribution of the concave hexagonal grid, the degree of influence of the negative Poisson's ratio on the micro-channel stress sensor is regulated, so that the device can achieve a completely independent effect on the stretching direction along the tube diameter. Sensitive, that is, the stress decoupling in the axial and lateral directions is realized, which provides a reasonable design direction for the device to only measure the stress signal in a specific direction.

Description

technical field [0001] The invention belongs to the technical field of stress sensor preparation, in particular to a micro-channel stress sensor based on structural metamaterials and a preparation method thereof. Background technique [0002] In recent years, flexible mechanical sensors, as an important component of flexible electronic devices, have attracted extensive attention and research because they can be used in wearable devices, flexible robots, electronic skin, prosthetics, and various human-computer interaction fields. middle. For different fields, it is often necessary to design various flexible mechanical sensors with different functional characteristics. [0003] Among all kinds of flexible mechanical sensors, they can be roughly divided into three categories according to the test signal output type of the mechanical sensor, namely resistive type, capacitive type and piezoelectric type. In addition, according to the change mechanism of the device when it recei...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/22B81B7/04
CPCG01L1/2287B81B7/04
Inventor 潘泰松毛琳娜颜卓程姚光高敏林媛
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA