Heating device of evaporation source and evaporation device

Abstract

The invention belongs to the technical field of evaporation, and relates to a heating device of an evaporation source and an evaporation device. The heating device of the evaporation source comprises a heating box body, heating pieces and a temperature control mechanism, wherein the heating box body is provided with a containing cavity used for containing the evaporation source, and at least part of the heating box body is provided with heat transfer parts, so that heat transfer occurs between the heat transfer parts and the evaporation source; the heating pieces are arranged in the heating box body and are used for generating heat radiation; and the temperature control mechanism is arranged on the heating box body, is electrically connected with the heating pieces and is used for monitoring the temperature of the evaporation source and controlling the heat generated by the heating pieces. The heating device of the evaporation source is simple in structure and convenient to use, the temperature of the evaporation source can be accurately monitored in real time, and then the evaporation quality of the evaporation source is improved.

Description

technical field [0001] The application belongs to the technical field of vapor deposition, and in particular relates to a heating device and vapor deposition equipment for an evaporation source. Background technique [0002] Organic Light-Emitting Diode (OLED) devices have many advantages such as thinner and thinner, higher brightness, lower power consumption, fast response, and higher definition, and can be widely used in the display field or lighting field of various terminal equipment. At present, the commonly used manufacturing methods of OLED devices include evaporation, inkjet printing, thermal transfer and other methods. Among them, the evaporation process is to heat the evaporation material under certain vacuum conditions, so that the evaporation material is melted (or sublimated) into a vapor composed of atoms, molecules or atomic groups, and then condenses on the surface of the substrate to form a film, thereby forming the function of the OLED device. layer. For ...

AI Technical Summary

Problems solved by technology

In the heating and evaporation stage, the evaporation temperature is one of the main factors. To ensure the quality of the film, it is necessary to accurately control the evaporation temperature. If the temperature accuracy is not high, it may cause problems such as poor film uniformity, which will affect the quality of the film and affect the device. shine

[0004] However, the existing evaporation source (evaporation source) heating device for heating the evaporation material in the crucible has problems such as temperature control accuracy and poor heating efficiency during the heating process.

If the temperature is too high, too much heat will be dissipated to the outside of the evaporation source, causing the evaporation mask above the evaporation source to be deformed by heat; if the temperature is low, the evaporation rate and evaporation amount of the evaporation material in the crucible will be reduced etc. will eventually reduce the evaporation quality of the crucible

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