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Piezoelectric micro-mechanical actuator

A technology of micro-mechanics and actuators, applied in the field of piezoelectric micro-mechanical actuators, can solve the problems of limited output displacement performance, achieve the effect of improving output performance, improving output performance, and reducing air pressure film damping

Pending Publication Date: 2021-07-20
广州蜂鸟传感科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem of limited output displacement performance of piezoelectric micro-mechanical actuators in the prior art, a piezoelectric micro-mechanical actuator is provided

Method used

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  • Piezoelectric micro-mechanical actuator

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] A piezoelectric micromechanical actuator, including a base 5, the base 5 is internally connected with two symmetrical driving platforms 4, and the two driving platforms 4 are respectively connected with two spring beams 3, and the two spring beams 3 are connected with the same translation stage 2. The mass block 1 is connected to the bottom surface of the translation platform 2, and a plurality of ventilation slots 6 are opened on both sides of the translation platform 2 opposite to the base 5, and the number of ventilation slots 6 is connected to the base 5 opposite to the ventilation slot 6. Matching adjustment column 7.

[0039] The piezoelectric micromechanical actuator has two excitation methods:

[0040] One is that the excitation electrode is arranged on the driving table 4, and its vibration form is as follows: Figure 9 As shown, in the working state under this excitation mode, the translation stage 2, the spring beam 3, and the drive table 4 vibrate together....

Embodiment 2

[0043] Such as image 3 As shown, the base 5 is composed of the first structural layer of the outer ring, the piezoelectric layer of the outer ring and the second structural layer 10 sequentially connected from top to bottom. The structural layer and the inner piezoelectric layer are composed.

[0044] The first structural layer on the outer ring and the first internal structural layer form the first structural layer 8. The first structural layer 8, the second structural layer 10 and the mass block 1 are mainly composed of silicon materials, specifically isotropic single crystal silicon, Anisotropic single crystal silicon, or polycrystalline silicon. The first structure layer 8, the second structure layer 10, and the proof mass 1 can be the same silicon material, or they can be different. The difference is not limited to the silicon material itself, but also includes the crystal orientation, resistivity, doping Miscellaneous properties are different.

[0045] The outer piez...

Embodiment 3

[0048] The spring beam 3 is made up of two parts of symmetrical springs, and each part of the springs is made up of at least one section of spring segments, and the springs are connected to the middle part or both sides of the displacement table 2. The number of sections and the number of bends of the spring beam 3 structure are not only different in appearance, but also directly related to the system stiffness of the device, resulting in large changes in the resonant frequency and vibration displacement of the device.

[0049] The connection position and connection method of the structure of the spring beam 3 and the translation platform 2, including but not limited to figure 1 The connection in the moving stage 2 can also be in the middle of the moving stage 2, or in an asymmetric form, such as Figure 6shown. The structure of the spring beam 3 and the connection position and connection mode of the translation platform 2 have a great adjustment effect on the vibration form ...

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Abstract

The invention discloses a piezoelectric micro-mechanical actuator, which belongs to the technical field of piezoelectric micro-machinery, solves the problem that the output displacement performance of the piezoelectric micro-mechanical actuator is limited during working in the prior art, and comprises a base, two symmetrical driving tables are connected in the base and are respectively connected with two spring beams, and the two spring beams are connected with a piezoelectric micro-mechanical actuator. The two spring beams are connected with the same displacement table, a mass block is connected to the bottom face of the displacement table, a plurality of vent grooves are formed in the two sides, opposite to the base, of the displacement table, and adjusting columns matched with the vent grooves in number are connected to the positions, opposite to the vent grooves, of the base. The three-stage displacement amplification mechanism with the mass block / displacement table, the spring beam and the driving table as the core is designed, and the output performance of the piezoelectric micromechanical actuator is improved.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric micromechanics, and in particular relates to a piezoelectric micromechanical actuator. Background technique [0002] Piezoelectric micromechanical actuator is a kind of mechanical actuator with micro-nano size. Through the piezoelectric effect of piezoelectric material, under electrical excitation, the mechanical parts of the actuator can produce axial displacement or angular deflection, and then output displacement externally. , deflection angle, acceleration or angular velocity for various sensor and actuator systems. [0003] The existing piezoelectric micromechanical actuators are working, due to the mechanical structure design of the actuator, air pressure film damping, excitation electrode layout, material performance limitations, processing technology and packaging methods, etc. Item performance is limited, such as output performance, degrees of freedom, power consumption, compatibil...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00H01L41/09H10N30/20
CPCB81B3/0035B81B2201/032H10N30/2041
Inventor 秦风李慧
Owner 广州蜂鸟传感科技有限公司