A deposition device for high-throughput preparation of Sibcn and a method for high-throughput preparation of Sibcn
A deposition device, high-throughput technology, applied in coating, gaseous chemical plating, metal material coating process, etc., to achieve the effect of increasing coating deposition rate, improving preparation efficiency, and reducing coating deposition time
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Embodiment 1
[0047] (1) Put the graphite sleeves with pipe diameters of 75mm, 80mm and 90mm into the corresponding holes on the circular plate, and block the redundant holes on the circular plate with graphite plates to prevent airflow from passing through;
[0048] (2) Cut the SiC fiber cloth into a size of 4mm×6mm, tie one end with a carbon rope, and tie the other end of the carbon rope to the support frame, and hang the sample at the center of the graphite sleeve;
[0049] (3) MTS and BCl are introduced into the reaction chamber 3 , NH 3 、H 2 , Ar. H 2 、CH 3 Cl 3 Si and BCl 3 After mixing, it is transported to the reaction chamber of the vertical reaction furnace through the first pipeline, and then the NH 3 It is transported to the reaction chamber through the second pipeline. NH 3 and BCl 3 The molar ratio is 1:1, BCl 3 The molar ratio with MTS is 2:3, Ar and BCl 3 The molar ratio of H is 5:2, H 2 The molar ratio to Ar is 2:5. The coating deposition temperature is 850° C...
Embodiment 2
[0051] (1) Put the graphite sleeves with pipe diameters of 75mm, 90mm and 95mm into the corresponding holes on the circular plate, and block the redundant holes on the circular plate with graphite plates to prevent airflow from passing through;
[0052] (2) Pre-polish the surface of the C / SiC material, and then process it into a size of 3mm×5mm×6mm, tie one end with a carbon rope, and tie the other end of the carbon rope to the support frame, and hang the sample at the center of the graphite sleeve;
[0053] (3) MTS and BCl are introduced into the reaction chamber 3 , NH 3 、H 2 , Ar. H 2 、CH 3 Cl 3 Si and BCl 3 After mixing, it is transported to the reaction chamber of the vertical reaction furnace through the first pipeline, and then the NH 3 It is transported to the reaction chamber through the second pipeline. NH 3 and BCl 3 The molar ratio is 2:1, BCl 3 The molar ratio of MTS and MTS is 3:1, Ar and BCl 3 The molar ratio of H is 5:4, H 2 The molar ratio to Ar i...
Embodiment 3
[0055] (1) Put graphite sleeves with pipe diameters of 75mm, 90mm, 95mm and 100mm into the corresponding holes on the circular plate, and block the redundant holes on the circular plate with graphite plates to prevent airflow from passing through;
[0056] (2) Polish the surface of the graphite strip in advance, and then process it into a size of 4mm×12mm×30mm, tie one end with a carbon rope, and tie the other end of the carbon rope to the support frame, and hang the sample at the center of the graphite sleeve;
[0057] (3) MTS and BCl are introduced into the reaction chamber 3 , NH 3 、H 2 , Ar. H 2 、CH 3 Cl 3 Si and BCl 3 After mixing, it is transported to the reaction chamber of the vertical reaction furnace through the first pipeline, and then the NH 3 It is transported to the reaction chamber through the second pipeline. NH 3 and BCl 3 The molar ratio of 1:1.5, BCl 3 The molar ratio of MTS and MTS is 1:10, Ar and BCl 3 The molar ratio of H is 5:4, H 2 The mola...
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