A small skid-mounted closed-loop test device for comprehensive performance evaluation of cryopumps

Abstract

The invention discloses a small skid-mounted closed-loop test device for comprehensive performance evaluation of cryogenic pumps, which includes a test loop, a skid-mounted box body, and heat-insulating and heat-insulating filling. The test circuit includes a pressurized liquid nitrogen storage tank, a filter, a cryogenic pump to be tested, a low temperature visualization glass tube, a low temperature flow meter, a fin coil heat exchanger, an atmospheric pressure liquid nitrogen storage tank, a low temperature flow regulating valve, Pressure stabilizing orifice plate, pressurized gas tank, high-speed camera, differential pressure transmitter; filter, test cryopump, low-temperature visualization glass tube, cryogenic flowmeter and high-speed camera are isolated and packaged by the inner box. The test circuit is integrated and fixed in the skid-mounted box, supported and fixed by epoxy suspenders and hung on the inner surface of the upper cover of the skid-mounted box. The system of the present invention is energy-saving and environment-friendly, easy to transport, easy and safe to operate, and the outlet fluid is visualized, and can meet the low-temperature performance test task requirements of small cryogenic pumps under various working conditions of wide pressure range, different supercooling degrees, and gas-liquid equalization.

Description

technical field [0001] The invention relates to cryopumps, in particular to a small skid-mounted closed-loop test device for comprehensive performance evaluation of cryopumps. Background technique [0002] With the development of cryogenic technology, the use of cryogenic fluid pumps has gradually increased. The development of a complete test device that can test the comprehensive performance of cryogenic pumps can greatly facilitate the debugging and optimization of pumps. Since the saturated vapor pressure of cryogenic fluid changes significantly with temperature, it is necessary to ensure the low temperature environment of the test pipeline during the test. For the performance test of the cryogenic centrifugal pump, in addition to the characteristic curve test of the head, flow rate and efficiency of the conventional centrifugal pump, as the pump inlet pressure changes, the cavitation characteristic test of the cryogenic fluid in the pump and the gas content rate of the p...

AI Technical Summary

Problems solved by technology

However, the vacuum insulation technology requires high vacuum degree and airtightness for all equipment, and the actual operation is complicated. Moreover, the system cannot control the pump inlet pressure and gas content, and cannot observe the fluid state at the pump outlet.

[0006] After searching the existing technology, it is found that the performance test system of the cryopump in the prior art has problems such as large heat leakage, difficult disassembly of the system, complicated operation of replacing the tested pump, etc., and the lack of comprehensive performance evaluation functions of the cryopump such as: test Pump inlet and outlet pressure and temperature, adjust pump inlet pressure and air content rate, pump outlet fluid visualization, etc.

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