A Hybrid Magnetic Focusing Lens Electron Beam Imaging System

A technology of electron beam imaging and magnetic focusing, applied in the direction of circuits, discharge tubes, electrical components, etc., to achieve consistent spatial resolution and improve the uniformity of spatial resolution

Active Publication Date: 2022-04-19
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS +1
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  • Claims
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Problems solved by technology

When the peak value of the pulse current increases to 1kA, a magnetic field strength of 6kG is generated, which improves the spatial resolution to 35um, but its imaging sensitive surface is only 25.6×12.8mm 2

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  • A Hybrid Magnetic Focusing Lens Electron Beam Imaging System
  • A Hybrid Magnetic Focusing Lens Electron Beam Imaging System
  • A Hybrid Magnetic Focusing Lens Electron Beam Imaging System

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Embodiment Construction

[0034] In order to have a clearer understanding of the technical features, purposes and effects of the present invention, the specific implementation manners of the present invention will now be described in detail with reference to the accompanying drawings.

[0035] In a preferred embodiment, the long magnetic lens 60 and the short magnetic lens 50 are two kinds of practical electron beam imaging systems, the advantage of the long magnetic lens 60 is that it can obtain better spatial resolution uniformity, and the short magnetic lens 50 is often used in The advantage of high-resolution electron microscopy is that it can obtain higher spatial resolution, but the field curvature is large and the uniformity of spatial resolution is poor. In order to improve the spatial resolution and its uniformity, this embodiment combines the advantages of the long magnetic lens 60 and the short magnetic lens 50, and combines the two kinds of lenses together to form a hybrid magnetic focusing ...

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Abstract

The invention relates to a hybrid magnetic focusing lens electron beam imaging system. In the system, the photocathode, anode grid, gated microchannel plate and CCD camera module are arranged coaxially in sequence, the photocathode and anode grid are adjacent to each other, the gated microchannel plate and CCD camera module are adjacent to each other, and the anode grid and gate are adjacent to each other. Controlled microchannel plate spacing preset flight distance; two short magnetic lenses are placed at the photocathode and gated microchannel plate respectively, and four long magnetic lenses are evenly placed in the electron drift area between the anode grid and the gated microchannel plate . After the planar photocathode of the present invention is imaged by a hybrid magnetic lens, the image plane is also a plane, thereby improving the uniformity of its spatial resolution, so that the spatial resolution of on-axis points and off-axis points is consistent.

Description

technical field [0001] The invention relates to the field of electron beam imaging, in particular to a hybrid magnetic focusing lens electron beam imaging system. Background technique [0002] In inertial confinement fusion (ICF) experiments, the plasma X-ray radiation generated by laser targeting contains extremely rich physical information, and its duration is on the order of ns. The detection of X-ray radiation characteristics by an ultrafast camera with ps time resolution is a key diagnostic technique in ICF research. Gated microchannel plate (MCP) framing camera can obtain the two-dimensional spatial distribution and time characteristics of X-ray radiation, so it plays an important role in ICF research. With the deepening of ICF research, especially in the fusion combustion stage, the time resolution of the gated X-ray framing camera is required to be better than 30ps. Due to the large dispersion of electron transit time in MCP, the further improvement of time resolut...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/04H01J37/141H01J37/26
CPCH01J37/04H01J37/141H01J37/261
Inventor 王峰蔡厚智刘进元
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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