The application provides a
gallium oxide device and a preparation method thereof, and the device comprises a Schottky device, an insulating high-thermal-
conductivity layer and a heat dissipation substrate; the Schottky device comprises a substrate, an epitaxial layer, a
dielectric layer, a Schottky contact
metal layer, an
ohmic contact metal layer and an
electrode pin; the insulating high-thermal-
conductivity layer is arranged on both sides of the
electrode pin; and the heat dissipation substrate is connected with the
electrode pin in the Schottky device through a
soldering pad. The
gallium oxide device provided by the application is covered with the insulating high-thermal-
conductivity layer material on the electrode and the functional area of the device, and the device is connected on the packaging heat dissipation substrate in an inverted manner, and the
external circuit is realized through the heat dissipation substrate. The heat dissipation capacity of the device is improved, the influence of temperature on the
electron drift is reduced, the heat generated by the
gallium oxide device is timely dissipated, the temperature of the device itself is reduced, and the
voltage resistance performance, reliability and working stability of the
gallium oxide device are improved.