Micro-lens array with dual light path isolation and preparation method thereof
A technology of micro-lens array and lens array, which is applied in the directions of lenses, optics, optical components, etc., can solve the problems of large compound eyes and difficult assembly of the lens, and achieve the effect of improving efficiency, low equipment requirements, and improving imaging quality.
Active Publication Date: 2021-08-17
SHANGHAI JIAO TONG UNIV
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Problems solved by technology
Due to the limitation of 3D printing accuracy, the size of the lens designed by this method is larger than that of the compound eye in nature, and it also faces problems such as assembly difficulties.
Method used
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[0036] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0037] refer to figure 1Shown is a process flow chart of a method for preparing a microlens array with double optical path isolation in a preferred embodiment of the present invention, which is performed in accordance with the following steps:
[0038] S1: Prepare a base mold with hemispherical convex structures arranged in an array on the surface:
[0039] Specifically: spin-coat the HMDS adhesive on the silicon wafer substrate 1 to enhance the adhesion between the photoresist and the substrate;...
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Abstract
The invention provides a micro-lens array with dual light path isolation and a preparation method thereof. The micro-lens array comprises: a plurality of micro fly-eye lenses arranged in an array on the upper surface of a first layer of negative photoresist; a Parylene film which is arranged on the lower surface of the first layer of negative photoresist and is used as an isolating layer; a black photoresist layer which is arranged on the lower surface of the Parylene film, wherein the black photoresist layer forms an isolation array, and the isolation array is located between every two adjacent miniature fly-eye lenses and used for blocking crosstalk between every two adjacent light paths; a second layer of negative photoresist which is arranged on the outer surface of the black photoresist layer and is used as a substrate, wherein the second layer of negative photoresist is filled in gaps among the isolation arrays and covers the surface of the black photoresist layer. According to the invention, the black photoresist layer capable of preventing crosstalk between adjacent light paths and the negative photoresist with self-writing capability are prepared by micro-nano processing, and the performance of high-resolution imaging is realized by performing double isolation on incident light.
Description
technical field [0001] The invention relates to the technical field of optical bionic compound eyes, in particular to a microlens array with double optical path isolation and a preparation method thereof. Background technique [0002] Eyes are one of the most important organs for organisms in nature to perceive external information. The compound eyes of insects have the advantages of wide field of view, high sensitivity, and the ability to detect fast-moving targets, which has attracted widespread attention. There are two main types of compound eyes in nature. One is a juxtaposed compound eye that can avoid light crosstalk, and the other is a superimposed compound eye with higher sensitivity. In a juxtaposed compound eye, each optical channel is optically isolated from adjacent optical channels to avoid contrast reduction caused by superimposed ghosting and stray light, so there is no crosstalk between them. The lens and photoreceptor form a microlens unit. The optical c...
Claims
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IPC IPC(8): G02B3/00
CPCG02B3/0006G02B3/0012
Inventor 杨斌翟玥琦路礼军刘景全
Owner SHANGHAI JIAO TONG UNIV