Inkjet head, method of manufacturing inkjet head, and inkjet recording method
A manufacturing method and technology of an inkjet head, which are applied in the fields of inkjet recording and inkjet recording of inkjet recording images, can solve problems such as erosion, and achieve the effect of excellent ink resistance and adhesion
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[0181] Hereinafter, although an Example demonstrates this invention concretely, this invention is not limited to this. In addition, the expression of "part" or "%" is used in an Example, Unless otherwise indicated, it means "part by mass" or "% by mass". In addition, unless otherwise specified, each operation was performed at room temperature (25 degreeC).
[0182] 《Making of Nozzle Plate》
[0183] [Production of Nozzle Plate 1]
[0184] According to the following method, the production of Figure 3A The nozzle plate 1 is formed with the described configuration.
[0185] (1) Preparation of substrate
[0186] As the substrate, a single crystal silicon substrate with a thickness of 100 μm was prepared.
[0187] (2) Formation of lyophobic layer basement membrane 1
[0188] Next, use a silicon compound containing alkane (abbreviation: TMS, tetramethylsilane, Si(CH 3 ) 4 )) as the material gas for the formation of the lyophobic layer base film 1, using argon gas as the carr...
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