Traveling wave antenna plasma source
A technology of plasma source and traveling wave antenna, applied in the field of ion source, can solve the problems of time-consuming, complicated process, inconvenient operation, etc., and achieve the effect of fast response, easy to use, and simple structure
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[0042] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0043] figure 1 , figure 2 The traveling-wave antenna structure independently designed for the present invention consists of six loop antennas placed outside the vacuum chamber. Among them, 1 is the feed antenna, 2-5 are four short-circuit antennas, 6 is the dummy load antenna, 7 is the 50Ω dummy load, and 8 is the quartz tube. The first antenna on the right is connected to the RF source as the power feeding end, the four antennas in the middle are short-circuited as the coupling end, and the first antenna on the left is connected to a 50Ω dummy load as the absorbing end. Such as figure 1 , label 1 represents the first antenna, which is the feed antenna; labels 2-5 are the four short-circuit antennas in the middle, which are used as coupling RF power antennas; 6 is connected to the dummy load antenna, which is used as the absorbing end. The six a...
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