Thin-film lithium niobate electro-optical modulator and preparation method thereof

Abstract

The invention discloses a thin-film lithium niobate electro-optical modulator and a preparation method, the thin-film lithium niobate electro-optical modulator comprises a silicon substrate, a buried oxide layer and a lithium niobate layer which are arranged from bottom to top, and the upper surface of the lithium niobate layer is etched to form a thin-film lithium niobate optical waveguide; the thin-film lithium niobate optical waveguide comprises a Mach-Zehnder structure; two sides of each optical waveguide arm of the Mach-Zehnder structure are respectively provided with a traveling wave signal electrode and a traveling wave grounding electrode, and a capacitance load type T structure electrode used for modulating optical signals in the optical waveguide arms is arranged between the traveling wave signal electrode and the traveling wave grounding electrode; and the two sides and the lower portion of each optical waveguide arm of the Mach-Zehnder structure are provided with hollowed-out isolation structures used for reducing the effective refractive index of microwave signals. According to the invention, the thin-film lithium niobate electro-optical modulator with ultra-low driving voltage, ultra-low microwave loss and ultra-large electro-optical bandwidth is realized under the silicon-based substrate, and ultra-high-speed and ultra-low-energy-consumption electro-optical modulation in the fields of optical communication, optical sensing, optical integration and the like in the future is facilitated.

Description

technical field [0001] The invention belongs to the fields of optical communication, optical sensing and optical integration, and specifically relates to a thin-film lithium niobate electro-optical modulator and a preparation method. Background technique [0002] With the continuous development of the information age, a large number of new information industries are constantly approaching people's daily life, such as 5G, cloud computing, big data processing, artificial intelligence, etc. These new technologies have brought great benefits to our daily life. At the same time, it is more convenient, and it also promotes our demand for high-speed, large-bandwidth, and low-power data processing and transmission technologies. Taking the data center, a typical application in short-distance optical communication, as an example, the network traffic speed of the pure data center is greatly increased, while the overall data capacity inside the data center will reach a high level, and t...

AI Technical Summary

Problems solved by technology

However, in the current field of high-speed optical communication, the modulation rate has generally transitioned from 100G to 400G, and it is very likely that the modulation rate will directly advance to 1.6T in the future.

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