Low-temperature plasma catalytic reaction regulation and control device

Abstract

The invention discloses a low-temperature plasma catalytic reaction regulation and control device, and the device comprises a dielectric barrier reactor for generating a discharge area, and a plurality of plate-shaped dielectric media detachably arranged in the discharge area, and the control of the discharge of the catalytic surface of the plate-shaped dielectric medium is realized by adjusting the distribution of the plate-shaped dielectric medium in the discharge region. According to the low-temperature plasma catalytic reaction regulation and control device, the spatial distribution of the plate-shaped dielectric medium in the discharge area is controllable, and the control on the low-temperature plasma discharge mode and parameters on the catalytic surface of the plate-shaped dielectric medium is achieved by regulating and controlling the spatial distribution of the plate-shaped dielectric medium in the discharge area; therefore, the mass transfer efficiency of the low-temperature plasma and the catalytic active component on the catalytic surface of the plate-shaped dielectric medium can be improved, and the requirement of low-temperature plasma catalytic reaction efficiency is met.

Description

technical field [0001] The invention relates to the field of microelectronic technology, in particular to a low-temperature plasma catalytic reaction regulating device. Background technique [0002] Low-temperature plasma catalysis is a special heterogeneous catalytic process, which needs to take into account both the formation of low-temperature plasma on the catalytic surface and the catalytic reaction. [0003] Plasma active particles have a very short lifespan and a limited propagation distance on the surface of the dielectric. If it can promote the formation of high-energy plasma on the surface of the dielectric, it can effectively improve the mass transfer characteristics of the plasma active material and the catalytic active component, thereby improving the plasma catalytic reaction. efficiency. Low-temperature plasma dry methane reforming (NPC-DRM) reactions are usually carried out in packed-bed dielectric barrier discharges (PB-DBDs) reactors, and spherical or othe...

AI Technical Summary

Problems solved by technology

However, in the PB-DBDs reactor, the ionization wave propagation path on the particle surface is short and the stability is poor, which cannot be adjusted to meet the mass transfer efficiency requirements of the high-energy plasma on the surface of the dielectric and the catalytically active components.

[0004] Therefore, how to avoid the difficulty in meeting the efficiency requirements of the plasma catalytic reaction due to the uncontrollable dielectric in the PB-DBDs reactor is a technical problem that those skilled in the art need to solve at present.

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