A device for absorbing stray light
An absorption device and stray light technology, applied in optics, optical components, instruments, etc., can solve problems affecting the service life of optical components in the main optical path, polluting the clean environment of the beam pipeline, and cracking the surface of optical components, so as to reduce the risk of damage, miscellaneous Good astigmatism absorption effect, increase the effect of contact area
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Embodiment 1
[0037] Such as figure 1 As shown, a stray light absorption device includes a lens 1, an absorber 2 and a peripheral pipe 3, wherein the lens 1 and the absorber 2 are sequentially arranged along the stray light transmission direction.
[0038] The lens 1 is used as a window of the stray light absorbing device to expand the incident stray light aperture. That is to say, the lens 1 is used to expand the incident stray light, which increases the contact area between the stray light and the absorber 2 and reduces the risk of laser flux damage. Specifically, the front surface of the lens 1 is coated with an anti-reflection film, which is used to transmit all the stray light into the stray light absorbing device as much as possible. At the same time, the curvature radius of the rear surface of the lens 1 is negative, which is used to expand the incident stray light aperture and reduce the laser damage load pressure of the absorber 2 . The lens 1 is made of an optical material with ...
Embodiment 2
[0046] Such as figure 1 As shown, the same parts of this embodiment and Embodiment 1 will not be repeated, and the difference is:
[0047] Lens 1 chooses fused silica, with a center thickness of 6mm and a clear aperture of 50mm×50mm. The front surface is coated with an anti-reflection coating. The transmittance within the clear aperture is better than 99.6%@351nm, and the radius of curvature of the rear surface is set to -100mm.
[0048] The absorber 2 is made of AB5 glass, the center thickness is 10mm, and the curvature radius of the front surface is -100mm. The lens 1 is placed with an inclination of 3° along the Y axis relative to the absorber 2 .
[0049] The focal distance of stray light is 400mm, the distance from the main point of stray light to lens 1 is 200mm, and the distance between lens 1 and absorber 2 is 100mm.
[0050] Based on the above optical parameters, the results of simulating the stray light absorption device based on the sequence mode of ZeMax ray trac...
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