Silicon-based MZI modulator with high extinction ratio based on splitting-ratio-adjustable MMI
A splitting ratio and modulator technology, applied in the direction of optical waveguide light guide, light guide, optics, etc., can solve the problem of low extinction ratio
Pending Publication Date: 2021-09-10
KUNMING UNIV OF SCI & TECH
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[0008] Aiming at the problems and deficiencies in the above-mentioned prior art, the present invention provides a silicon-based MZI modulator with high extinction ratio based on the adjustable splitting ratio MMI. The present invention performs multimode interference splitter and multimode interference coupler operation, can effectively solve the current problem of low extinction ratio based on Mach-Zehnder type silicon light modulator
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Embodiment 1
[0028] Embodiment 1: as Figure 1-5 As shown, a silicon-based MZI modulator with high extinction ratio based on an adjustable splitting ratio MMI includes an optical input channel 1, and a multimode multi-mode modulator connected to the optical input channel 1 with an adjustable optical power splitting ratio in the MZI structure. Interference splitter 2, optical output channel 3, multimode interference coupler 4 with adjustable optical power ratio and connected to optical output channel 3; said multimode interference splitter 2 and multimode interference coupler 4 It is connected through the optical transmission waveguide 5, and the optical transmission waveguide 5 is equipped with a modulation phase-shifting arm 6 capable of carrying signals and capable of optical modulation; the multimode interference splitter 2 also includes a first loading electrode 7 at the top, The first multimode interference waveguide 23 and two multimode interference splitter output ports 8, the multi...
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The invention relates to a silicon-based MZI modulator with high extinction ratio based on splitting-ratio-adjustable MMI. The silicon-based MZI modulator comprises a light input channel, a multi-mode interference splitter connected with the light input channel, a light output channel and a multi-mode interference coupler connected with the light output channel. The multi-mode interference splitter and the multi-mode interference coupler are connected through an optical transmission waveguide, and a modulation phase shift arm capable of loading signals is attached to the optical transmission waveguide; the multi-mode interference splitter further comprises a first loading electrode, a first multi-mode interference waveguide and two multi-mode interference splitter output ports which are located at the top; and the multi-mode interference coupler also comprises a second loading electrode, a second multi-mode interference waveguide and two multi-mode interference coupler input ports which are located at the top. According to the invention, the light intensity of the two arms is kept at the same level when the MZI is modulated, the extinction ratio of the device during output is improved, and the problem that the extinction ratio of a current MZI light modulator is low is effectively solved.
Description
technical field [0001] The invention relates to a silicon-based MZI modulator with high extinction ratio based on an adjustable splitting ratio MMI, belonging to the technical field of semiconductor silicon-based optoelectronic communication device integration. Background technique [0002] Electro-optic modulators are one of the most critical devices in silicon photonics. Because of their high speed and high efficiency, they have attracted extensive attention from digital circuits and analog fiber links. Phase modulation or amplitude modulation is usually used in the modulator, where the phase modulation mainly changes the refractive index of the material by changing the carrier concentration, and then changes the propagation constant of light in the waveguide. Amplitude modulation mainly uses a physical method to change the absorption coefficient of the material to change the intensity of the outgoing light. At present, the most common method is to combine the two. On the...
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IPC IPC(8): G02F1/03G02B6/12
CPCG02F1/0305G02B6/12G02B2006/12142G02B2006/12038
Inventor 方青胡鹤鸣张馨丹马晓悦陈华张志群
Owner KUNMING UNIV OF SCI & TECH