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Distributed multifunctional gas mass flow controller based on single-chip microcomputer

A gas mass flow, distributed technology, used in flow control, mass flow measurement devices, flow control using electrical devices, etc., can solve problems such as high cost consumption

Pending Publication Date: 2021-09-14
HEFEI UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The main purpose of the present invention is to overcome the problem of excessive cost consumption of traditional digital circuit control, and propose to upload data to the cloud to realize real-time monitoring and control

Method used

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  • Distributed multifunctional gas mass flow controller based on single-chip microcomputer
  • Distributed multifunctional gas mass flow controller based on single-chip microcomputer

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Hereinafter figure 1 with figure 2 Embodiment 1 of the present invention, that is, the method of precise indexing from the machine 2 and querying data by the host 1, as further described.

[0025] Core controller, industrial Internet of Things and human machine interactive systems are integrated on a PC circuit board 5. The core controller includes the master core processor 10, the A / D acquisition module 11, the D / A output module 12, the power module 14, and the RS232 bus 13. The gas mass flow sensor 3 outputs different analog voltage signals to the core controller 10 in different gas environments, and is connected to the core controller 10 via the RS232 bus 13.

[0026] The gas flow sensor 3 performs an output gas via a gas delivery conduit 4 and is connected to the RS232 bus 13 on the PC circuit board 5. The core controller 11 is the STM32, and the A / D acquisition module 11 converts the analog voltage signal output from the gas mass flow sensor to the flow data and ...

Embodiment 2

[0033] Hereinafter figure 1 with figure 2 Embodiment 2 of the present invention, that is, an embodiment of a precise gas ratio according to the present invention.

[0034] The human machine interaction between the host machine and the LCD display 8 has a device index number to be queried. Select one of the devices to get all the gas mass flow, set the threshold, alarm threshold, and the like. By setting the flow rate threshold and the alarm device, accurate control traffic inflows achieve the above object, the system of the present invention is more convenient, lowered, and saves human resources compared to human supervision control.

[0035] The gas mass flow controller can transmit a control command by the industrial Internet access control host 1, and change the D / A output module 12 output voltage of the corresponding device, and then control the gas mass flow rate of the gas mass flow sensor 3.

[0036] The gas mass flow controller can be implemented by a human machine inter...

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Abstract

The invention discloses a distributed multifunctional gas mass flow controller based on a single-chip microcomputer, and relates to the technical field of semiconductor manufacturing. The gas mass flow controller comprises a gas mass flow sensor, a core controller, an industrial Internet of things and a man-machine interaction system. The gas mass flow controller comprises a plurality of functional modules for data acquisition, data uploading, parameter setting and the like, and a control system is integrated in a case, so that the control cost of a traditional digital circuit structure is greatly reduced, the manpower resource of a traditional monitoring system is liberated, a data network of the mass flow sensor is innovatively established, and the control of a factory is more centralized, accurate and convenient.

Description

Technical field: [0001] The present invention relates to the field of semiconductor manufacturing, and more particularly to a distributed multi-function gas mass flow controller based on a single chip microcomputer, comprising a mass flow control device, a control system, and a mass flow meter that can be used for gas state monitoring. Background technique: [0002] Flow measurement and control is a very important part of the gas integrated delivery system. Quality Flow Controller is a commonly used in industrial and can accurately control gas or liquid. The mass flow meter is a heat-sensitive measurement, and the flow rate is measured by the molecular mass of the split molecules, since it is used as a heat measurement, so it does not affect the measurement of the measurement due to the change of the gas temperature and pressure. Quality flow meter is a more accurate, fast, reliable, efficient, stable, flexible flow measuring instrument, more extensive applications in the fields ...

Claims

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Application Information

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IPC IPC(8): G05D7/06G01F1/76G05B19/042
CPCG05D7/0617G01F1/76G05B19/042
Inventor 朗贤礼吴韵婕马玉军任志杰舒双宝
Owner HEFEI UNIV OF TECH