Light source device, illumination device, and exposure device
A technology of light source device and exposure device, which is applied to the cooling/heating device of lighting device, lighting device, exposure device of photoengraving process, etc., can solve the problem that LED chips cannot be lit, and the content of heating of LED chips is not disclosed.
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no. 1 approach
[0028] use figure 1 The light source device 1 will be described. figure 1 It is a plan view of the light source device 1 of this embodiment. The light source device 1 has a power board 2 , an LED chip 3 , a cooler 4 , and a control unit 5 . A plurality of LED chips 3 are disposed on the power substrate 2 , and hereinafter, the power substrate 2 and the plurality of LED chips 3 are collectively referred to as an LED array. Copper wiring is connected and mounted on the power substrate 2 to the LED chip 3 to form a circuit for driving the LED chip 3 . By passing a current through the circuit, light of a predetermined wavelength is output from the LED chip 3, and the LED chip 3 generates heat.
[0029] The LED array in this embodiment has a chip array in which a plurality of LED chips 3 are electrically arranged in series. can be as figure 1 As shown, an LED array is formed including a plurality of chip columns, and the chip columns are connected to the control unit 5 via con...
no. 2 approach
[0053] In the first embodiment, a mode in which the direction in which the refrigerant flows in the cooler 4 is parallel to the direction in which the LED chips are arranged in the chip array has been described. In this embodiment, the description is as follows: the arrangement of the LED chips is determined in consideration of the level of the luminous efficiency of the LED chips, which is the same as that of the first embodiment, but the direction in which the refrigerant flows in the cooler 4 is not the same as that of the chip row. The arrangement direction of the LED chips is vertical. Figure 5 It is a diagram of a light source device in which different levels of LED chips 3 a to 3 c are arranged in consideration of the cooling capacity of the cooler 4 .
[0054] In this embodiment, one chip row is constituted by LED chips of the same rank. In a region near the refrigerant inlet 8 having a high cooling capacity, a chip array composed of low-grade LED chips 3 a is arrang...
no. 3 approach
[0061] In the first embodiment and the second embodiment, the case where the flow path of the refrigerant is in one direction has been described. In the present embodiment, a description will be given in which the flow paths of the refrigerant exist in a plurality of directions. Figure 7 of (a), Figure 7 (b) is a diagram of the light source device 1 having two refrigerant inlets 8a, 8b and two refrigerant outlets 9a, 9b. The refrigerant flow path is formed of two flow paths in the direction from the refrigerant inlet 8a side to the refrigerant outlet 9a side and in the direction from the refrigerant inlet 8b side to the refrigerant outlet 9b side.
[0062] exist Figure 7 of (a), Figure 7 In (b), a plurality of LED chips 3a to 3c are arranged on two power substrates 2a and 2b, and the light source device 1 is constituted by two LED arrays. Control units 5a and 5b including power supplies are independently connected to each LED array, and control the current flowing to t...
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