Micrometric displacement measurement system and measurement method for picometer-order resolution
A measurement system and micro-displacement technology, applied in measurement devices, instruments, optical devices, etc., can solve problems such as difficulty in accurately capturing trigger points, hinder the improvement of measurement accuracy and resolution, and achieve low cost, low noise level, Robust effect
Active Publication Date: 2021-10-22
HEFEI UNIV OF TECH
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Problems solved by technology
The contact trigger probe commonly used in three-coordinate measuring machines is difficult to accurately capture the trigger point due to the existence of pre-travel, the "golf ball effect" produced by the ball at the end of the contact at the moment of contact, and the limitation of the sensitivity of the detection system. The improvement of its measurement accuracy and resolution
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[0037] In this embodiment, in order to realize the detection of micro-displacement signals smaller than the nanometer level, a micro-displacement measurement system with picometer-level resolution is proposed, which is a micro-nano measurement system design based on the principle of fiber grating sensing, which can Creating an error self-compensation mechanism plays a key role in improving the reliability of system measurement and correcting and optimizing the structure of the micro-nano measurement system. In order to guide the design of micro-nano measurement and instrument system, it provides theoretical basis and technical support. Such as figure 1 As shown, the measurement system includes: a probe module, an optical path module, a static lock-in amplification processing module, a host computer acquisition and processing module, and a micro-displacement drive module.
[0038] The probe module includes: measuring FBG sensor 1, matching FBG sensor 2, precision stainless ste...
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The invention discloses a micrometric displacement measurement system and measurement method for picometer-order resolution, the system comprises a probe module, an optical path module, a static lock-in amplification processing module, an upper computer acquisition processing module and a micrometric displacement driving module, the probe module comprises a measurement FBG sensor, a matching FBG sensor, a precision stainless steel needle tube and an external support; the optical path module comprises an ASE broadband light source, a first circulator, a second circulator and an InGaAs photoelectric detector; the upper computer acquisition processing module comprises a data acquisition card and a computer; the micro-displacement driving module comprises a piezoelectric ceramic nanometer positioner, a piezoelectric ceramic driver and a three-dimensional precise micropositioner. According to the invention, the micro-displacement can be detected, and the picometer-scale micro-displacement measurement resolution, the nanometer-scale sensitivity and the low noise level are realized, so that the micro-displacement sensor has the advantages of high robustness to measurement environment interference, stable work, good performance and low cost.
Description
technical field [0001] The invention relates to micro-nano measurement, in particular to a micro-displacement measurement system and a measurement method based on the sensing principle of fiber Bragg gratings. Background technique [0002] In recent years, nanotechnology has developed rapidly, semiconductor technology, microelectronics technology, and micro-electromechanical systems (MEMS) have developed rapidly, and the precision of modern manufacturing has increased rapidly. The geometric dimensions of the manufactured micro-devices are almost in the order of micro-nanometers. To carry out precise measurement of these micro-devices, it is necessary to develop special high-precision detection methods and technical equipment. [0003] Small three-coordinate measuring machines and various probe measurement systems are the core technologies and instruments in the field of high-precision micro-nano measurement. These devices usually have probe tips with micro-nano feature sizes...
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Login to View More IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 刘芳芳金彪杨子涵林芳慧周何银李红莉夏豪杰
Owner HEFEI UNIV OF TECH