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Variable magnetic field confinement plasma jet device and method thereof

A plasma and jet device technology, applied in the field of ions, can solve the problems of poor plasma jet accuracy, poor microbeam directionality, and single plasma jet generation, and achieves improved accuracy, improved use effect, and reasonable structural settings. Effect

Active Publication Date: 2021-10-29
富时精工南京有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the traditional plasma jet device does not have an external controllable magnetic field, and the directionality of the microbeams produced by the plasma jet without control constraints is poor. At this stage, the plasma is not constrained and controlled by the magnetic field. At the same time The confinement force of the magnetic field cannot be changed. In actual operation, the occurrence of the plasma jet is relatively simple, and the accuracy of the plasma jet is poor. Therefore, it is difficult to control the generated plasma to achieve the ideal use effect, which cannot fully satisfy People's needs and applications in specific environments

Method used

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  • Variable magnetic field confinement plasma jet device and method thereof
  • Variable magnetic field confinement plasma jet device and method thereof
  • Variable magnetic field confinement plasma jet device and method thereof

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Embodiment 1

[0045] see figure 1 , 2 , 4, 5, 6, the present invention provides a technical solution: this embodiment provides a plasma jet device with variable magnetic field confinement, which utilizes the upper coil 211a in the first confinement mechanism 210 and the pre-adjustment coil 214 The quantitative relationship between them, the degree of tightness, can achieve a good binding force on the plasma jet, and can control the change of the magnetic field line to realize the change of the control effect of the plasma jet binding force;

[0046] see figure 1 , 2 , the present invention includes a plasma jet device 100, the plasma jet device 100 includes a high-voltage radio frequency generator 102, a gas supply pipe 103 installed on the high-voltage radio frequency generator 102, a flexible tube 104 on the side wall of the high-voltage radio frequency generator 102, and a flexible pipe 104 installed on a flexible The plasma generator 101 at the end of the pipe 104; the ion generator ...

Embodiment 2

[0057] see figure 1 , 3, 4, 5, 6, the present invention provides a technical solution: a plasma jet device 100, a variable start restriction mechanism 200, an adjustment mechanism 300 for adjusting the variable start restriction mechanism 200, and a linkage mechanism of the linkage adjustment mechanism 300 The structure of 400 is the same as that of the linkage mechanism 400 of the plasma jet device 100 and the linkage adjustment mechanism 300 of the first embodiment.

[0058] The difference is that the variable opening constraint mechanism 200 is set as a second constraint mechanism 220; the second constraint mechanism 220 includes an upper flow guide ring 221, a lower flow guide ring 222 with the same specifications located below the upper flow guide ring 221, and the upper flow guide ring 221 It is arranged directly below the central electrode 106, and the upper guide ring 221 and the lower guide ring 222 are both energized correspondingly, and the side wall of the upper g...

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Abstract

The invention discloses a variable magnetic field confinement plasma jet device and a method thereof. The variable magnetic field confinement plasma jet device comprises a plasma jet device, wherein the plasma jet device comprises a high-voltage radio frequency generator, a gas supply pipe mounted on the high-voltage radio frequency generator, a flexible pipe on the side wall of the high-voltage radio frequency generator, and a plasma generator mounted at the tail end of the flexible pipe. The device further comprises a variable open confinement mechanism, an adjusting mechanism used for adjusting the variable open confinement mechanism and a linkage mechanism in linkage with the adjusting mechanism. The device is mainly composed of the plasma jet device for plasma generation, the variable open confinement mechanism for generating restraining force, the adjusting mechanism for adjusting the magnetic field restraining force and the linkage mechanism, the variable open confinement mechanism can generate the restraining force on plasma jet, the jet precision is improved, the zooming function of the plasma jet is achieved, and a good fine adjustment function is achieved in a specific place.

Description

technical field [0001] The invention relates to the field of plasma technology, in particular to a variable magnetic field confinement plasma jet device and a method thereof. Background technique [0002] Plasma jet is an important application form of plasma, and has excellent application prospects in the fields of material modification, surface treatment, plasma chemistry and plasma medical treatment. In traditional use, by adjusting the external electric field and magnetic field, the energy is preferentially transferred to electrons instead of heavy particles, and the transferred energy is transmitted to heavy particles through the collision of electrons to excite and ionize, thereby producing highly active substances. The low pressure increases the mean free path of the electrons and thus enables them to gain sufficient energy. In practice, an external excitation source is used, and after plasma is generated in a limited cavity, the generated plasma is blown out of the d...

Claims

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Application Information

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IPC IPC(8): H05H1/10H05H1/46
CPCH05H1/10H05H1/46
Inventor 李冰妍
Owner 富时精工南京有限公司
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