Undersampling non-raster scanning atomic force microscope high-speed imaging system and method

Abstract

The invention discloses an undersampling non-raster scanning atomic force microscope high-speed imaging system and method. A point-by-point sampling measurement module, an undersampling measurement module, a sampling point distribution module, a Bayesian compressed sensing reconstruction calculation module, a primary function calculation module, a random function generator, a random number generator and a row and column counter are arranged in a traditional atomic force microscope. Sampling point distribution is divided in a to-be-measured area by constructing a measurement matrix, then a three-dimensional scanner is guided through the sampling point distribution, a force sensor obtains under-sampling information of the to-be-measured area, morphology information reconstruction is achieved on the basis of the under-sampling information and the measurement matrix, and finally high-speed imaging is achieved by comparing standard morphology information.

Description

technical field [0001] The invention relates to the technical field of atomic force microscope imaging, more particularly, a high-speed imaging method and system for guiding the atomic force microscope to acquire under-sampling information by non-raster scanning through a measurement matrix, and then completing image reconstruction. Background technique [0002] Atomic Force Microscopy (AFM, Atomic Force Microscopy) is a kind of micro-nano measurement equipment, which detects the surface information of the sample by detecting the interaction force between the probe and the sample. AFM excites the probe to vibrate at the resonance frequency through the excitation signal. As the probe approaches the sample surface, the change of the interaction force between the probe and the sample makes the probe amplitude decrease. During the scanning process, the amplitude of the cantilever probe is controlled by the feedback controller to keep constant, so the amplitude information of the...

AI Technical Summary

Problems solved by technology

The undersampling scanning trajectory unit USS of the present invention is used on the one hand to solve the problem of long imaging time in the existing atomic force microscope system, on the other hand, it is used to reduce the memory resource occupation of the compressed sensing algorithm, and solve the problem of compressed sensing due to the high memory resource occupation of the algorithm. Difficult problems to implement in ordinary computers

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