Scanning electron microscope
An electron microscope and electron beam technology, applied in the field of microscopy, can solve the problems of small space angle and low collection efficiency of cathode fluorescence detectors, and achieve the effect of large range and high efficiency
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[0037] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. The following embodiments are used to illustrate the present invention , but not to limit the scope of the present invention.
[0038] In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, or in a specific orientation. construction and operation, ...
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