Scanning electron microscope

An electron microscope and electron beam technology, applied in the field of microscopy, can solve the problems of small space angle and low collection efficiency of cathode fluorescence detectors, and achieve the effect of large range and high efficiency

Pending Publication Date: 2021-11-19
FOCUS E BEAM TECH BEIJING CO LTD
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, cathodoluminescence detection is realized by a side-type cathodoluminescence detector, but the space angle received by the cathodoluminescence detector is small, and it can only collect the cathodoluminescence scattered by part of the angle, and the collection efficiency of the cathodoluminescence detector is low

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  • Scanning electron microscope
  • Scanning electron microscope
  • Scanning electron microscope

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Embodiment Construction

[0037] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. The following embodiments are used to illustrate the present invention , but not to limit the scope of the present invention.

[0038] In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, or in a specific orientation. construction and operation, ...

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Abstract

The invention discloses a scanning electron microscope, comprising: an electron optical lens barrel for generating an electron beam and focusing the electron beam on a sample; and a first detector used for receiving photons generated when the electron beam acts on the sample. The first detector comprises a reflector and a photon detector, and the reflector is used for reflecting photons generated on the sample to the photon detector; and the reflector at least comprises a first reflecting surface and a second reflecting surface, and the first reflecting surface and the second reflecting surface are used for reflecting photons which are generated on the sample and scattered at different angles. According to the reflector, photons scattered at different angles and generated on a sample are reflected to the photon detector, and the photon detector is large in photon collection range and high in efficiency.

Description

technical field [0001] The invention belongs to the technical field of microscopes, in particular to a scanning electron microscope. Background technique [0002] In the prior art, the cathode fluorescence signal generated by the electron beam acting on the sample means that when the electron beam bombards the surface of the sample, in addition to secondary electrons, backscattered electrons, Auger electrons and X-rays, the emitted frequency is at Electromagnetic waves in the ultraviolet, infrared or visible light bands. The basic principle is that the electrons inside the sample are excited by the incident electrons to a high-energy state, and after a certain relaxation time, they transition back to a low-energy state and release energy, and part of the energy is emitted in the form of electromagnetic radiation. The physical process of cathodoluminescence of a sample under electron beam excitation is determined by its electronic structure, and the electronic structure is r...

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Application Information

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IPC IPC(8): H01J37/28H01J37/244
CPCH01J37/28H01J37/244
Inventor 刘莎何伟
Owner FOCUS E BEAM TECH BEIJING CO LTD
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