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Ultrahigh vacuum environment far ultraviolet-extreme ultraviolet light chopping periodic modulation light splitting device

An ultra-high vacuum, extreme ultraviolet light technology, applied in the field of optical systems, to achieve the effect of high frequency stability

Active Publication Date: 2021-12-10
TONGJI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

A chopper device that works in an ultra-high vacuum environment and in the far-ultraviolet-extreme ultraviolet band, and has the functions of light modulation and light splitting has not been reported yet.

Method used

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  • Ultrahigh vacuum environment far ultraviolet-extreme ultraviolet light chopping periodic modulation light splitting device
  • Ultrahigh vacuum environment far ultraviolet-extreme ultraviolet light chopping periodic modulation light splitting device
  • Ultrahigh vacuum environment far ultraviolet-extreme ultraviolet light chopping periodic modulation light splitting device

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Embodiment Construction

[0030] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments. This embodiment is carried out on the premise of the technical solution of the present invention, and detailed implementation and specific operation process are given, but the protection scope of the present invention is not limited to the following embodiments.

[0031] In order to solve the problems of light intensity monitoring and weak light signal detection in the far ultraviolet-extreme ultraviolet optical system, the present invention has been designed to work stably for a long time in an ultra-high vacuum environment, and realize periodic A device for chopping modulation and splitting light. To split light in this band, it is usually necessary to coat the surface of the fan blade with an optical film with high reflectivity in the working band. Common optical films include Pt, C, Ni, B 4 C, SiC, Al, Au and other monolayer films. But Pt...

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Abstract

The invention relates to an ultrahigh vacuum environment far ultraviolet-extreme ultraviolet light chopping periodic modulation light splitting device comprising a mounting base, and a high-reflection film reflector, a bottom plate, a servo motor and a photoelectric sensor which are arranged on the mounting base; the high-reflection film reflector comprises a substrate and an Au / B4C double-layer film plated on the surface of the substrate; and the high-reflection film reflector is mounted on the bottom plate, the bottom plate is fixedly connected with an output shaft of the servo motor, the high-reflection film reflector is driven to rotate under driving of the servo motor, and the high-reflection film reflector outputs chopping periodic modulation TTL signals when passing through the photoelectric sensor. Compared with the prior art, the Au / B4C double-layer film is used for the first time, the reflectivity of far ultraviolet-extreme ultraviolet light under the grazing incidence working angle of 20 degrees is improved, the periodic modulation function on far ultraviolet-extreme ultraviolet incident light and reflected light under the ultrahigh vacuum environment is achieved, and detection on extremely weak light signals under the low signal-to-noise ratio condition can be achieved by combining a lock-in amplifier.

Description

technical field [0001] The invention belongs to the field of optical systems, and relates to a modulation spectroscopic device, in particular to an ultra-high vacuum environment far ultraviolet-extreme ultraviolet light chopping periodic modulation spectroscopic device. Background technique [0002] The measurement of optical properties such as reflectivity and transmittance of far-ultraviolet-extreme ultraviolet optical elements requires online monitoring of incident light intensity in an ultra-high vacuum environment, which is critical to ensure the accuracy of test results. Common light intensity monitoring methods include inserting mirrors with holes / slots, nickel meshes, or auxiliary gratings into the optical path combined with microchannel plates or photodiodes for detection. In a system with weak incident light and poor signal-to-noise ratio, the measurement sensitivity of these structures cannot meet the test requirements. At this time, it is necessary to use a lock...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J1/04G01J1/42
CPCG01J1/0411G01J1/0459G01J1/429
Inventor 李文斌余越谢春王占山
Owner TONGJI UNIV
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