Ultrahigh vacuum environment far ultraviolet-extreme ultraviolet light chopping periodic modulation light splitting device

Abstract

The invention relates to an ultrahigh vacuum environment far ultraviolet-extreme ultraviolet light chopping periodic modulation light splitting device comprising a mounting base, and a high-reflection film reflector, a bottom plate, a servo motor and a photoelectric sensor which are arranged on the mounting base; the high-reflection film reflector comprises a substrate and an Au/B4C double-layer film plated on the surface of the substrate; and the high-reflection film reflector is mounted on the bottom plate, the bottom plate is fixedly connected with an output shaft of the servo motor, the high-reflection film reflector is driven to rotate under driving of the servo motor, and the high-reflection film reflector outputs chopping periodic modulation TTL signals when passing through the photoelectric sensor. Compared with the prior art, the Au/B4C double-layer film is used for the first time, the reflectivity of far ultraviolet-extreme ultraviolet light under the grazing incidence working angle of 20 degrees is improved, the periodic modulation function on far ultraviolet-extreme ultraviolet incident light and reflected light under the ultrahigh vacuum environment is achieved, and detection on extremely weak light signals under the low signal-to-noise ratio condition can be achieved by combining a lock-in amplifier.

Description

technical field [0001] The invention belongs to the field of optical systems, and relates to a modulation spectroscopic device, in particular to an ultra-high vacuum environment far ultraviolet-extreme ultraviolet light chopping periodic modulation spectroscopic device. Background technique [0002] The measurement of optical properties such as reflectivity and transmittance of far-ultraviolet-extreme ultraviolet optical elements requires online monitoring of incident light intensity in an ultra-high vacuum environment, which is critical to ensure the accuracy of test results. Common light intensity monitoring methods include inserting mirrors with holes / slots, nickel meshes, or auxiliary gratings into the optical path combined with microchannel plates or photodiodes for detection. In a system with weak incident light and poor signal-to-noise ratio, the measurement sensitivity of these structures cannot meet the test requirements. At this time, it is necessary to use a lock...

AI Technical Summary

Problems solved by technology

A chopper device that works in an ultra-high vacuum environment and in the far-ultraviolet-extreme ultraviolet band, and has the functions of light modulation and light splitting has not been reported yet.

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