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Wafer box in-out conveying device for vertical oxidation furnace

A technology of conveying device and oxidation furnace, applied in furnaces, furnace components, conveyor objects, etc., can solve the problems of low precision, low production efficiency, slow counting efficiency, etc., and achieve a simplified detection process, a high degree of automation, and improved efficiency. Effect

Pending Publication Date: 2021-12-31
48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, there are many artificial factors in the transmission process of silicon wafers in domestic vertical oxidation furnaces, the reliability of cassette transmission is poor, and the production efficiency is low, which cannot meet the mass production needs of semiconductor manufacturers.
Therefore how to efficiently and reliably realize the automatic transmission of the cassette between the outside world and the internal structure of the vertical oxidation furnace will directly affect the production capacity and product quality of the vertical oxidation furnace. In addition, in the prior art, the silicon wafers in the cassette ( Chip) counting method is manual counting, resulting in slow counting efficiency and low accuracy

Method used

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  • Wafer box in-out conveying device for vertical oxidation furnace
  • Wafer box in-out conveying device for vertical oxidation furnace
  • Wafer box in-out conveying device for vertical oxidation furnace

Examples

Experimental program
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Effect test

Embodiment 1

[0026] Such as Figure 1 to Figure 5 As shown, the cassette transfer device used in the vertical oxidation furnace of this embodiment includes a frame 1, a cassette loading platform 2, a lifting platform 3, a lifting mechanism 4, a pushing mechanism 5 and a counting unit, and the lifting mechanism 4 is designed In the frame 1, the lifting platform 3 is arranged at the driving end of the lifting mechanism 4, the cassette carrying platform 2 and the pushing mechanism 5 are arranged on the lifting platform 3, and the pushing mechanism 5 is used to push the cassette carrying platform 2 out of the frame 1 The top of the frame 1 is provided with an avoidance groove 11 for the cassette carrier 2 to pass through. The counting unit includes a laser emitting receiving unit 61 and a reflector 62. In this embodiment, the laser emitting and receiving unit 61 is preferably a photoelectric sensor integrating transceiver. The pushing mechanism 5 can be arranged on the frame 1 or on the lifti...

Embodiment 2

[0041] The difference between the sheet cassette in and out conveying device for the vertical oxidation furnace of the present embodiment and that of Embodiment 1 is:

[0042] In this embodiment, the counting unit includes a laser emitting unit 61 and a laser receiving unit 62, preferably two through-beam photoelectric sensors, one photoelectric sensor emits laser light, and the other photoelectric sensor receives laser light. Once sending and receiving, according to the photoelectric sensor of the receiver to receive the laser light changes, it is judged whether there is a silicon chip in the card slot inside the cassette 7 .

[0043] The rest not described are basically the same as those in Embodiment 1, and will not be repeated here.

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Abstract

The invention discloses a piece box in-out conveying device for a vertical oxidation furnace, and the device comprises a rack, a piece box bearing table, a lifting table, a lifting mechanism, a pushing mechanism and a counting unit, wherein the lifting mechanism is arranged in the rack, the lifting table is arranged at the driving end of the lifting mechanism, the piece box bearing table and the pushing mechanism are arranged on the lifting table, the pushing mechanism is used for pushing the film magazine bearing table to extend out of the rack, an avoiding groove allowing the film magazine bearing table to pass through is formed in the top of the rack, the counting unit comprises a photoelectric sensor and a reflective mirror, and the photoelectric sensor and the reflective mirror are arranged on the two sides of the avoiding groove respectively. The feeding and discharging processes do not need personnel participation, the automation degree is high, the number of silicon wafers in the wafer box can be automatically counted in the conveying process of the wafer box by combining the lifting mode of the lifting mechanism with the laser emitting and receiving unit and the reflective mirror, the manual mode is replaced, and the efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment, in particular to a chip box in and out conveying device for a vertical oxidation furnace. Background technique [0002] Vertical oxidation furnace is an important process equipment in the pre-process of semiconductor production line. With the continuous improvement of process technology and continuous upgrading of products, higher and higher requirements are put forward for the automation level of vertical oxidation furnace. As an important transport carrier for semiconductor silicon wafers, a certain number of silicon wafers are placed in the box, which can prevent silicon wafer fragments or contamination of silicon wafers during the transportation process. It is convenient for transfer and can better protect silicon wafers. At present, there are many artificial factors in the transmission process of silicon wafers in domestic vertical oxidation furnaces, the reliability of casse...

Claims

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Application Information

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IPC IPC(8): H01L21/677F27D3/00
CPCH01L21/67742F27D3/00
Inventor 曾裕民陈若愚王学仕万喜新
Owner 48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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