Device and method for testing fluorine content in fluorine-containing mixed gas

Abstract

The invention discloses a device and a method for testing fluorine content in fluorine-containing mixed gas, the testing device comprises a sample gas supply device, a conversion pile and oxygen content analysis equipment, the sample gas supply device, the conversion pile and the oxygen content analysis equipment are sequentially communicated through a pipeline provided with a control valve, the sample gas supply device is used for outputting the fluorine-containing mixed gas, the conversion pile is filled with a conversion filling material, the conversion pile is used for only converting fluorine gas in the fluorine-containing mixed gas into oxygen, and the oxygen content analysis equipment is used for carrying out oxygen content analysis on the oxygen-containing mixed gas treated by the conversion pile. The fluorine gas is converted into oxygen gas through reaction by adopting the conversion pile, and then the oxygen content is tested by utilizing the oxygen content analysis equipment, so that the fluorine content in the original sample gas is indirectly obtained, the analysis result can be directly read, complex calculation and fluorine gas pretreatment measures are avoided, and the operation is simple.

Description

technical field [0001] The invention belongs to the technical field of gas analysis, in particular to a device and method for testing the fluorine content in a fluorine-containing mixed gas. Background technique [0002] Fluorine-containing laser gas is a kind of fluorine mixed gas. The commonly used F2 preparation content is about 0.1%-0.5%. Other remaining gases are composed of neon, argon, helium, krypton and other gases. At present, the fluorine content The test is basically a method of absorbing chemical reagents, and then calculating and deriving the fluorine content through titration and other operations, but this kind of method is complicated to operate, and fluorine gas is a poisonous gas, and it will inevitably diffuse into the air during pretreatment, which is harmful to the human body. At the same time, there are strict requirements for data processing and calculation; there are also some uncertain factors such as the direct use of fluorine concentration tester, ...

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Problems solved by technology

[0002] Fluorine-containing laser gas is a kind of fluorine mixed gas. The commonly used F2 preparation content is about 0.1%-0.5%. Other remaining gases are composed of neon, argon, helium, krypton and other gases. At present, the fluorine content The test is basically a method of absorbing chemical reagents, and then calculating and deriving the fluorine content through titration and other operations, but this kind of method is complicated to operate, and fluorine gas is a poisonous gas, and it will inevitably diffuse into the air during pretreatment, which is harmful to the human body. At the same time, there are strict requirements on the processing and calculation of data; there are also those who directly use the fluorine concentration tester, but the consumption of electrodes is too fast, and there are uncertain factors such as large errors.

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