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A lower electrode fabrication method with dense floating surface structure

A technology of surface structure and production method, applied in the field of display screen, can solve the problems of uneven cooling airflow, bulging of stainless steel sheets, separation of stainless steel sheets, etc., to improve the cooling effect, reduce the formation of imprints, and improve the cooling effect.

Active Publication Date: 2022-07-05
苏州众芯联电子材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Due to the large interval between the floating points of the above-mentioned floating point structure, the resulting problem is that the cooling air flow is uneven, so the cooling effect on the glass substrate is also uneven, so the place where the glass substrate contacts the floating points is prone to local overheating. Leave marks and affect the display effect of LCD / OLED screen
Moreover, processing floating points with the above method also has restrictions on the interval of floating points. Usually, the interval between adjacent floating points cannot be less than 2mm.
If it is less than 2mm, it will be very difficult to manually stick the double-sided tape between the pores of the masking fixture, and it is very difficult to operate, and it is easy to partially cover the pores when attaching
At the same time, if the width of the double-sided tape is less than 2mm, the adhesion of the double-sided tape will also become too small. During the spraying process, the stainless steel sheet is likely to bulge due to thermal deformation (that is, the adhesion of the double-sided tape is not enough to overcome The stress generated by the thermal deformation of the stainless steel sheet causes the stainless steel sheet to detach from the adsorption surface), causing the sprayed ceramic powder to enter the originally shielded area

Method used

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  • A lower electrode fabrication method with dense floating surface structure
  • A lower electrode fabrication method with dense floating surface structure
  • A lower electrode fabrication method with dense floating surface structure

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Effect test

Embodiment 1

[0070] To make the lower electrode for G5 (about 1300*1100mm), the peripheral protrusions on the surface are protrusions with a width of 7.5mm and a height of 100μm. That is, a floating structure with an interval of 1 mm) and a height of 80 μm, the distance s between the floating point and the inner side of the peripheral protrusion 1 and s 2 is 2.5mm.

[0071] Production Method:

[0072] S1, the lower electrode is fabricated according to the existing process, and a peripheral protrusion is formed on the surface of the lower electrode, and a concave structure is formed in the middle, and the width of the edge of the peripheral protrusion is 7.5 mm and the height is 100 μm;

[0073] S2, make a shielding fixture for processing floating point, select 8 stainless steel sheets with a thickness of about 1mm, and splicing each 4 pieces together to form a shielding fixture that can completely cover the area on the inner side of the protrusion on the electrode surface of the lower el...

Embodiment 2

[0081] The lower electrode for G10.5 (about 2950*3350mm in size) is made. The peripheral protrusions on the surface are protrusions with a width of 15mm and a height of 120μm. The diameter of the uniform distribution in the middle is 0.5mm. 1mm (that is, the interval is 0.5mm), the height of the floating point structure is 100μm, the distance s between the floating point and the inner side of the peripheral protrusion 1 and s 2 is 10mm.

[0082] Production Method:

[0083] S1, the lower electrode is fabricated according to the existing process, and the surface of the lower electrode is formed with a peripheral protrusion and a concave structure in the middle, and the width of the edge of the peripheral protrusion is 15 mm and the height is 120 μm;

[0084] S2, make a masking fixture for processing floating point, select 24 stainless steel sheets with a thickness of about 1mm, and splicing each 6 pieces together to form a masking fixture that can completely cover the area ins...

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Abstract

The invention discloses a lower electrode with a dense floating-point surface structure and a manufacturing method thereof. The lower electrode comprises a lower electrode, peripheral protrusions are arranged around the electrode surface of the lower electrode, and floating-point electrodes distributed in an array are also arranged within the range of the peripheral protrusions. , the spacing between floats is 0.25‑2mm. By arranging a dense floating structure on the surface of the lower electrode, the uniformity of the cooling gas flow can be improved, thereby improving the uniformity of the cooling effect on the glass substrate and reducing the formation of imprints on the glass substrate. At the same time, by using this manufacturing method, a floating-point array with a smaller pitch can be arranged on the lower electrode, so as to ensure the circulation of the cooling gas, thereby improving the cooling effect on the glass substrate.

Description

technical field [0001] The invention relates to the field of display screens, in particular to a lower electrode with a dense floating surface structure and a manufacturing method thereof. Background technique [0002] In the current display field, liquid crystal display (LCD) and organic electro-optical laser display (OELD) are the more commonly used display screens. Among them, the lower electrode is one of the core components in the processing equipment of the two. It is used for dry etching, chemical vapor deposition and other processes. Its main function is to fix the glass substrate through electrostatic adsorption during processing. At present, there are two commonly used adsorption surface structures of the lower electrode, one is with floating point on the adsorption surface, and the other is without floating point on the adsorption surface. [0003] At present, in the production of large-size (8th generation and above) panels, most of the lower electrodes with flo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/13H01L51/56H01L51/52
CPCG02F1/1303H10K50/805H10K71/00Y02P70/50
Inventor 张立祥赵凯
Owner 苏州众芯联电子材料有限公司