Omni-directional dynamic heat source pendulum type three-axis micro-mechanical accelerometer and processing method thereof

Abstract

The invention discloses an omni-directional dynamic heat source pendulum type three-axis micro-mechanical accelerometer and a processing method thereof. The accelerometer comprises an upper sensitive layer, a lower sensitive layer and a cover plate, a heater is arranged at the center of the sensitive layer and suspended at the center of the sensitive layer through six completely-symmetrical semicircular supporting beams, a circular middle heating cavity is arranged below, the lower sensitive layer comprises four thermistors which are orthogonally distributed, and a rectangular middle detection cavity is arranged below; the heater and the thermistors are electrified in a constant current mode; and a groove is etched on the cover plate and is hermetically connected with the upper surface of the sensitive layer. According to the invention, the three-axis acceleration can be detected, the measurement range is wide, the sensitivity is high, and the response speed is fast. Meanwhile, the sensor is simple in processing technology, compact in structure, small in structural stress, high in reliability and easy to intellectualize and integrate, and meets the development direction of the sensor towards microminiaturization, integration and intelligence.

Description

technical field [0001] The invention relates to the technical field of detecting the acceleration and posture parameters of a moving carrier by utilizing the pendulum of an omnidirectional dynamic heat source to swing under the action of linear acceleration, especially relates to an omnidirectional dynamic heat source pendulum type three-axis micro-mechanical accelerometer and its processing method, belonging to inertia measurement field. Background technique [0002] Due to the application requirements of carrier attitude measurement in various fields such as civil vehicles, railway construction, industrial production, bridge construction, earthquake research, geodetic surveying and mapping, geological and mineral exploration, marine survey, satellite communication, robot engineering, etc., in recent years, sensor technology and The organic combination of emerging science and technology will make the attitude sensor develop towards the direction of miniature, comprehensive ...

AI Technical Summary

Problems solved by technology

Due to the small velocity of the thermal airflow, the asymmetric temperature field gradient caused by the deflection of the airflow is very small, so the unbalanced voltage output by the Wheatstone bridge composed of the thermistor is small, and the sensitivity of the sensor is low

In the existing solutions, although the sensitivity can be improved by increasing the power of the heater, due to the limitation of power consumption, the sensitivity has not been substantially changed and improved, and it is difficult to break through this practical bottleneck

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