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Folding capacitive load electrode structure, electro-optical modulator and preparation method of electro-optical modulator

An electro-optic modulator and capacitive load technology, which is applied in the field of optical communication technology and integrated optical modulation, can solve the problems of large microwave loss and low performance of electro-optic modulators, and achieve the effects of minimizing parasitic capacitance, improving performance, and suppressing excitation

Pending Publication Date: 2022-01-28
SUN YAT SEN UNIV
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  • Application Information

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Problems solved by technology

[0005] The present invention provides a folded capacitive load electrode structure, an electro-optic modulator and a preparation method thereof in order to overcome the defects of large microwave loss and low performance of the electro-optic modulator caused by the slot line mode in the prior art

Method used

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  • Folding capacitive load electrode structure, electro-optical modulator and preparation method of electro-optical modulator
  • Folding capacitive load electrode structure, electro-optical modulator and preparation method of electro-optical modulator
  • Folding capacitive load electrode structure, electro-optical modulator and preparation method of electro-optical modulator

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Embodiment 1

[0044] see Figure 3-Figure 4 , this embodiment proposes a folded capacitive load electrode structure, including a main signal electrode 21, a first main ground electrode 22, and a second main ground electrode 23, wherein the first main ground electrode 22-main signal electrode 21-second The main ground electrode 23 forms the G-S-G coplanar waveguide transmission line 2, including a straight transmission line part and a curved transmission line part; in the straight transmission line part, both sides of the main signal electrode 21 are connected to load T-type electrodes, the first main ground electrode 22 and the second main ground One side between the electrode 23 and the main signal electrode 21 is connected to a loaded T-shaped electrode; the part of the transmission line is bent, and the main signal electrode 21 erects several air bridges at the bend to connect the first main ground electrode 22 and the second main ground electrode 23 ;

[0045] In this embodiment, the m...

Embodiment 2

[0049] see Figure 5-Figure 6 , this embodiment proposes a folded capacitive load electrode structure, and chamfers are provided on the outside of the corner structure.

[0050] In this embodiment, the main signal electrode 21 includes a first straight main signal electrode 211, a first curved main signal electrode 212, a second straight main signal electrode 213, a first electrode chamfer 2121 and a second electrode chamfer 2122; One end of the first electrode chamfer 2121 is connected to the first straight main signal electrode 211, and the other end is connected to the first curved main signal electrode 212;

[0051] One end of the second electrode chamfer 2122 is connected to the first curved main signal electrode 212 , and the other end is connected to the second straight main signal electrode 213 .

[0052] In this embodiment, there are four air bridges, which are set up respectively above the first electrode chamfer 2121 and the second electrode chamfer 2122, and the a...

Embodiment 3

[0056] see Figure 5-Figure 6 , this embodiment proposes a folded capacitive load electro-optic modulator, the modulator is a two-stage folded capacitive load electro-optic modulator that is folded once, including when n=1 proposed in Embodiment 1, A folded capacitive load electrode structure and a lithium niobate waveguide structure folded once, the lithium niobate waveguide structure is arranged on the folded capacitive load electrode structure; the lithium niobate waveguide structure includes a first waveguide 111 and The second waveguide 112; the first waveguide 111 is installed between the loading T-shaped electrodes 4 respectively arranged on the first main ground electrode 22 and the first direct main signal electrode 211, and respectively arranged on the second main ground electrode 23 and the loading T-type electrode 4 on the second straight main signal electrode 212; the second waveguide 112 is installed on the loading T-type electrode 4 respectively arranged on the ...

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Abstract

The invention provides a folding capacitive load electrode structure, an electro-optical modulator and a preparation method of the electro-optical modulator. The electrode structure comprises a main signal electrode, a first main ground electrode, a second main ground electrode and a plurality of air bridges. The first main ground electrode, the main signal electrode and the second main ground electrode form a G-S-G coplanar waveguide transmission line. The plurality of air bridges are erected at the bending part of the main signal electrode to connect the first main ground electrode with the second main ground electrode. The electro-optical modulator comprises an electrode structure and a lithium niobate waveguide structure, and the waveguide structure is arranged on the folding capacitive load electrode structure. The lithium niobate waveguide structure comprises a first waveguide and a second waveguide. Loading T-shaped electrodes are arranged on the two sides of the waveguides. A folding capacitive load electro-optical modulator is adopted, a parasitic coupling slot line mode can be restrained to the maximum extent, the electro-optical modulator can efficiently work in a push-pull mode, and therefore electric signal transmission loss and return loss are reduced.

Description

technical field [0001] The invention relates to the fields of optical communication technology and integrated optical modulation technology, and more specifically, to a folded capacitive load electrode structure, an electro-optic modulator and a preparation method thereof. Background technique [0002] The high-speed, low-power electro-optic modulator is the core device for realizing high-speed information conversion in optical interconnection. Among them, lithium niobate is the most popular material for making electro-optic modulators. The emergence of the thin-film lithium niobate platform has pushed the performance and integration scale of lithium niobate modulators to a new level. By dry etching the lithium niobate thin film layer, an optical waveguide with low loss and high refractive index contrast can be obtained. Thanks to this lithium niobate waveguide with strong optical confinement, the modulation efficiency is greatly improved to 2V / cm. Such as figure 1 As sh...

Claims

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Application Information

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IPC IPC(8): G02F1/03G02F1/035G02B6/125
CPCG02F1/0316G02F1/035G02B6/125
Inventor 蔡鑫伦徐梦玥朱运涛高升谦
Owner SUN YAT SEN UNIV
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