Micro LED mass transfer self-leveling device and application thereof

Abstract

The invention belongs to the related technical field of semiconductors, and discloses a Micro LED mass transfer self-leveling device and application thereof. The device comprises: a lower wafer motion table which comprises a first support with the freedom degrees in the X direction, the Y direction and the Z direction and a sliding table; an upper wafer moving platform which comprises a second bracket with degrees of freedom in X, Y and Z directions and an adsorption structure; and a substrate direct-driven self-leveling micro holder which comprises a spherical motor and a self-leveling micro holder, wherein the spherical motor is arranged on the sliding table, and the self-leveling micro holder is driven by the spherical motor to rotate or lock in the X, Y or Z direction. The self-leveling micro holder comprises a synchronous adjusting disc and a lower wafer adsorption disc, a plurality of top columns are arranged on the surface of the synchronous adjusting disc, a force sensor is arranged above each top column, and the lower wafer adsorption disc is provided with holes corresponding to the top columns so that the force sensors can protrude out of the surface of the lower wafer adsorption disc. The device is not limited by the area of the transfer head, the parallelism in the large-plane transfer process can be achieved, and the transfer efficiency is remarkably improved.

Description

technical field [0001] The present invention belongs to the technical field related to semiconductors, and more specifically relates to a self-leveling device for mass transfer of Micro LEDs and its application. Background technique [0002] Micro LED (also known as μLED) is a new generation of inorganic self-luminous display technology that shrinks the size of traditional LEDs to less than 50 μm and is highly integrated with drive circuits on a single chip. Compared with traditional display technologies, it has higher brightness. High, lower power consumption, longer life, fast response and higher reliability and other unique advantages, it has a wide range of applications in high-resolution display, biomedical, visible light communication, wearable electronics and other fields. One of the difficulties in the current development of μLED technology lies in the mass transfer process, which requires the transfer of millions of micron-sized μLEDs from the epitaxially grown subs...

AI Technical Summary

Problems solved by technology

However, although laser transfer can satisfy high-speed and selective transfer, there are many factors affecting the transfer accuracy. It is necessary to study the laser parameters (such as laser energy density, pulse frequency, spot size, etc.), the geometric parameters of the transfer device (such as the distance between the plates, Chip spacing) and other parameters, and the laser equipment is expensive, relatively speaking, the cost will be higher

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