Bulk acoustic wave resonator and manufacturing method thereof

A bulk acoustic wave resonator, resonator technology, applied in electrical components, impedance networks, etc., can solve problems such as energy dissipation, performance impact, acoustic wave leakage, etc.
CN114094975APending Publication Date: 2022-02-25MEMSENSING MICROSYST SUZHOU CHINA
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Patent Information

Authority / Receiving Office
CN ยท China
Current Assignee / Owner
MEMSENSING MICROSYST SUZHOU CHINA
Publication Date
2022-02-25

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Abstract

The invention relates to a bulk acoustic wave resonator. The bulk acoustic wave resonator comprises a substrate, wherein the substrate comprises a cavity, an opening of the cavity is located in an upper surface of the substrate, and the bottom of the cavity is sealed by the substrate; a piezoelectric film above the substrate and the cavity; and two groups of interdigital electrodes which are positioned on an upper surface of the piezoelectric film and are staggered with each other. The invention also relates to a preparation method of a bulk acoustic wave resonator.
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Description

Technical field

[0001] The present invention relates to the field of microelectromechanical, and in particular to a body acoustic resonator and a method of manufacturing the same. Background technique

[0002] The filter is used as a radio filter device, directly determines the operating frequency band and bandwidth of the communication device, playing a raised role in the RF front end.

[0003] In the 3G / 4G filter market, the filter based on the body acoustic wave (BAW) has the advantages of low insertion loss, high rectangular coefficient, high power capacity, and therefore widely used in contemporary wireless communication systems. However, the emergence of 5G communications, the acoustic filter proposed higher requirements:

[0004] (1) 5G NR (New Radio) uses a higher frequency band, the acoustic wave (BAW) filter acoustic and ohmic loss As the operating frequency rises sharply, the increase in the insertion loss of the filter is increased;

[0005] (2) 5G NR band N78, N79 ...

Claims

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