Electrostatic force tuning type MEMS electric field sensor and detection method

Abstract

The invention discloses an electrostatic force tuning type MEMS electric field sensor and a control method, the electrostatic force tuning type MEMS electric field sensor comprises a driving electrode, a vibration pick-up electrode, a resonant structure and an electrostatic force sensitive electrode, the electrostatic force sensitive electrode is connected with the resonant structure, the driving electrode is used for forming a driving capacitor with the resonant structure, the vibration pick-up electrode is used for forming a vibration pick-up capacitor with the resonant structure, the electrostatic force sensitive electrode is used for sensing a to-be-detected electric field to cause change of the resonant frequency of the resonant structure, and the vibration pickup electrode detects the change of the resonant frequency of the resonant structure to obtain a detection result of the to-be-detected electric field. According to the application, the excitation signal is applied to the driving electrode to cause resonance of the resonant structure, the electrostatic force sensitive electrode causes change of the resonant frequency of the resonant structure under the action of the electrostatic force of the to-be-measured electric field, and the vibration pickup electrode measures the to-be-measured electric field by detecting the change of the resonant frequency. The sensor is simple in structure, easy to manufacture, low in cost and beneficial to large-scale networked application.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to an electrostatic force tuning type MEMS electric field sensor and a detection method. Background technique [0002] The electric field sensor is the core component to realize the detection of electric field strength, and is widely used in important fields such as aerospace, weather forecasting, disaster warning, smart grid, industrial production, and scientific research. With the upgrading and rapid development of micro-nano sensor technology, the construction of multi-point fusion high-precision and high-stability MEMS electric field sensor network is an important development direction for application upgrading and filling gaps. Therefore, there is an urgent demand for high-end digital intelligent micro electric field sensors. . [0003] In the current commercial electric field sensors, the working principle of the sensor is generally based on the analog signal detection output...

AI Technical Summary

Problems solved by technology

[0003] In the current commercial electric field sensors, the working principle of the sensor is generally based on the analog signal detection output. In the complex electromagnetic environment, the anti-interference ability is still insufficient; especially for the MEMS electric field sensor, the currently available chips are mainly based on the principle of charge induction. Due to the sensitive chip size Small, limited sensing area, weak effective signal, low signal-to-noise ratio, more sensitive to changes in the external electromagnetic environment, and still difficult to meet the needs of high-end applications

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