Micro-disk modulator

A modulator and microdisk technology, applied in the fields of instruments, nonlinear optics, optics, etc., can solve the problems of comprehensive performance gap, unable to meet the future development requirements of optical interconnection and optical communication, etc., to reduce the preparation cost, simple structure, and improve modulation The effect of efficiency

Pending Publication Date: 2022-03-22
WUHAN OPTICAL VALLEY INFORMATION OPTOELECTRONICS INNOVATION CENT CO LTD
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Problems solved by technology

[0004] At present, a variety of silicon-based electro-optic modulators have been successfully designed and manufactured, and various technical indicators have been gradually improved, but there is still

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[0025] The technical solutions of the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0026] In the description of the present invention, it is to be understood that the orientation or positional relationship of the term "length", "width", "depth", "upper", "lower", "outside", etc., based on the drawings The orientation or positional relationship is intended to facilitate the description of the present invention and simplified description, rather than indicating or implying that the referred to means must have a specific orientation, and is constructed and operated in a particular orientation, so it is not understood to limit the invention.

[0027] In the embodiment of the present invention, the term "substrate" refers to a material that adds a subsequent material layer thereon. The substrate itself can be patterned. The material added to the top of the substrate can be patterned or can be maintai...

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Abstract

The micro-disk modulator provided by the embodiment of the invention comprises a substrate layer; the slab waveguide layer is positioned on the substrate layer; the coupling waveguide and the micro-disc resonance structure are arranged in the slab waveguide layer in parallel, the micro-disc resonance structure comprises a first doping structure and a second doping structure which are sequentially arranged in a stacked mode in the thickness direction of the substrate layer, and the doping type of the first doping structure is opposite to that of the second doping structure; the projection of the second doping structure on a preset plane is circular, and the preset plane is perpendicular to the thickness direction of the substrate layer; and an electrode electrically connected with the micro-disk resonant structure.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a microdisk modulator. Background technique [0002] Drawing on the development route of large-scale integrated circuits, research is being carried out at home and abroad to integrate active devices (such as modulators, detectors, etc.) and optical waveguide devices (such as optical splitters / condensers, etc.) A photonic integrated chip with LSI-like advantages. Photonic integrated chips have the characteristics of low cost, small size, low power consumption, flexible expansion and high reliability. In the process of optical fiber communication, the intensity of light can be controlled by the electro-optic modulator, so the electro-optic modulator occupies an important position in the optical fiber communication system. At the same time, the electro-optic modulator is also one of the important optoelectronic devices in the photonic integrated chip solution. [0003] In ...

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Application Information

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IPC IPC(8): G02F1/015G02F1/025
CPCG02F1/0152G02F1/025
Inventor 张宇光肖希王磊胡晓陈代高
Owner WUHAN OPTICAL VALLEY INFORMATION OPTOELECTRONICS INNOVATION CENT CO LTD
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