Micro-ring modulator

A micro-ring modulator and micro-ring resonance technology, applied in the fields of instruments, nonlinear optics, optics, etc., can solve problems such as the inability to meet the future development requirements of optical interconnection and optical communication, and the gap in comprehensive performance.

Pending Publication Date: 2022-02-11
WUHAN OPTICAL VALLEY INFORMATION OPTOELECTRONICS INNOVATION CENT CO LTD
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0004] At present, a variety of silicon-based electro-optic modulators have been successfully designed and manufactured, and various technical indicators have been gradually improved, but there is still

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Embodiment Construction

[0027] The technical solutions of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0028] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "length", "width", "depth", "upper", "lower", "outer" etc. are based on those shown in the accompanying drawings. Orientation or positional relationship is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention.

[0029] In embodiments of the present invention, the term "substrate" refers to a material on which subsequent layers of material are added. The substrate itself can be patterned. The mater...

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Abstract

The embodiment of the invention provides a micro-ring modulator, which comprises: a substrate layer; a slab waveguide layer positioned on the substrate layer; a coupling waveguide and a micro-ring resonance structure arranged in the slab waveguide layer in parallel, wherein the micro-ring resonance structure comprises a first doping structure and a second doping structure which are sequentially arranged in a stacked mode in the thickness direction of the substrate layer, and the doping type of the first doping structure is opposite to that of the second doping structure; and an electrode electrically connected with the micro-ring resonance structure.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a microring modulator. Background technique [0002] Drawing on the development route of large-scale integrated circuits, research is being carried out at home and abroad to integrate active devices (such as modulators, detectors, etc.) and optical waveguide devices (such as optical splitters / condensers, etc.) A photonic integrated chip with LSI-like advantages. Photonic integrated chips have the characteristics of low cost, small size, low power consumption, flexible expansion and high reliability. In the process of optical fiber communication, the intensity of light can be controlled by the electro-optic modulator, so the electro-optic modulator occupies an important position in the optical fiber communication system. At the same time, the electro-optic modulator is also one of the important optoelectronic devices in the photonic integrated chip solution. [0003] In ...

Claims

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Application Information

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IPC IPC(8): G02F1/025G02F1/035
CPCG02F1/025G02F1/035
Inventor 张宇光肖希王磊胡晓陈代高
Owner WUHAN OPTICAL VALLEY INFORMATION OPTOELECTRONICS INNOVATION CENT CO LTD
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