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Manufacturing method of magnetic control bionic film microstructure

A manufacturing method and microstructure technology, applied in the direction of photolithography process, microlithography exposure equipment, photoplate process coating equipment, etc., can solve the problems of friction performance and application of materials without micro-scale MRE, and achieve Simple structure and high reliability

Pending Publication Date: 2022-03-25
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The existing technology mainly involves the mechanical properties and applications of large-scale MRE materials, including friction properties and applications, but there is no technical solution for the friction properties and applications of micro-scale MRE materials

Method used

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  • Manufacturing method of magnetic control bionic film microstructure
  • Manufacturing method of magnetic control bionic film microstructure
  • Manufacturing method of magnetic control bionic film microstructure

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Embodiment 1: Manufacturing method of magnetron biomimetic thin film microstructure with parallel anisotropic microstructure

[0030] S1. Spin-coat the negative photoresist SU-8 2050 (MicroChem) evenly on the cleaned silicon substrate;

[0031] S2. Forming a micron-scale regular hexagonal groove array, i.e. a concave template, on the negative photoresist obtained in step S1 by photolithography;

[0032]S3. Mix PDMS prepolymer and curing agent (Dow Corning Sylgard 184) at a weight ratio of 10:1, stir evenly with a glass rod, and then put the PDMS mixture into an ultrasonic oscillator (Tianjin Autosaiens Instrument Co., Ltd. AS2060B) Oscillation, on the one hand, removes air bubbles, and on the other hand, promotes further mixing of the two components;

[0033] S4. Spherical Fe with a particle size of 20nm 3 o 4 Nanoparticles (Aladdin Chemistry Co., Ltd.) are mixed with the PDMS mixture obtained in step S3 at a weight percentage of 10%; the mixing method is: after full...

Embodiment 2

[0037] Embodiment 2: Manufacturing method of magnetron biomimetic thin film microstructure with perpendicular anisotropy microstructure

[0038] The difference between embodiment 2 and embodiment 1 is: in step S6, the applied magnetic field is perpendicular to the composite coating film surface ( figure 1 (b)), Fe under the action of magnetic field 3 o 4 The nanoparticles aggregated to form a columnar structure perpendicular to the surface of the film, making the composite coating film have a vertically anisotropic microstructure ( figure 2 Enlarged small picture in (b), obtain the magnetron biomimetic film microstructure with vertical anisotropic microstructure ( figure 2 (b)).

Embodiment 3

[0039] Embodiment 3: The manufacturing method of the magnetron biomimetic film microstructure with isotropic microstructure

[0040] The difference between embodiment 3 and embodiment 1 is that step S7 is directly executed after step S5 is completed, that is, no magnetic field is applied in the process of manufacturing the thin film microstructure, and a magnetron bionic with isotropic microstructure is obtained after step S7 is completed. Thin film microstructure ( figure 2 (c)), Fe 3 o 4 Nanoparticle aggregates are randomly distributed in the matrix ( figure 2 Enlarged small image in (c)).

[0041] PDMS-Fe 3 o 4 Mechanical characterization of composite films:

[0042] Under the action of a magnetic field, the Fe in the film 3 o 4 The magnetic particles tend to align along the direction of the magnetic field in the elastomeric PDMS, resulting in changes in the elastic modulus of the film, as well as the generation of magnetic stress and strain in the film. Microstr...

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Abstract

The invention discloses a manufacturing method of a magnetic control bionic film microstructure, and belongs to the field of intelligent materials and micromachining. By limiting the mixing ratio and mixing mode of the magnetic nanoparticles and the PDMS mixture and combining glass rod stirring, ultrasonic oscillation and vortex mixing, the distribution and form of the magnetic nanoparticles in PDMS are controlled, the obtained thin film microstructure has good magnetic response characteristics, and a fine thin film surface microstructure can be formed. In addition, the microstructure of the thin film and the concentration of the magnetic nanoparticles have obvious influence on the magnetic elasticity modulus, the invention provides three methods for forming the microstructure, the concentration range of the magnetic nanoparticles is limited, and the friction performance and the motion characteristic of the microstructure of the thin film can be effectively controlled through a magnetic field.

Description

technical field [0001] The invention belongs to the field of intelligent materials and microfabrication, and relates to a method for manufacturing a magnetron biomimetic thin film microstructure. Background technique [0002] Magnetorheological Elastomer (MRE) is a composite material composed of non-magnetic elastic polymer matrix and magnetic particles, which can respond to external stimuli such as magnetic field, force, temperature, etc. Functional properties such as resistance, magnetostriction, piezoelectric resistance, and thermal resistance have broad application prospects in the engineering field. The existing technology mainly involves the mechanical properties and applications of large-scale MRE materials, including friction properties and applications, but there is no technical solution for the friction properties and applications of micro-scale MRE materials. Contents of the invention [0003] In order to improve the motion control of small-scale soft robots, t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/16G03F7/20
CPCG03F7/162G03F7/20
Inventor 张遒姝彭倍马志楠文盼
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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