Insulated gate bipolar transistor (IGBT) power module packaging structure with low stress and high thermal conductivity
A power module and packaging structure technology, which is applied in semiconductor devices, semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, etc., can solve the problems of high cost, reduce device junction temperature, avoid warping or fracture, Avoid the effect of deterioration or even failure
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[0034] The present invention as Figure 1-7 As shown, a low stress and high thermal conductivity IGBT power module packaging structure includes a substrate 1, an insulating substrate substrate 2 and a chip 5 bonded sequentially from bottom to top;
[0035] The upper metal layer 21 and the lower metal layer 23 are respectively bonded to the upper top surface and the lower bottom surface of the insulating substrate, that is, the upper top surface of each first insulating substrate substrate 221 and each second insulating substrate substrate of the insulating substrate. The upper top surface of the sheet 222 is respectively bonded to the lower bottom surface of the upper metal layer 21, and the lower bottom surface of each first insulating substrate substrate 221 and the lower bottom surface of each second insulating substrate substrate 222 of the insulating substrate are respectively bonded to the lower surface of the upper metal layer 21. Bonding on the top surface of the metal...
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