High-gain and high-efficiency on-chip antenna based on silicon-based process
An on-chip antenna, high-gain technology, applied in the directions of separately powered antenna arrays, antennas, antenna coupling, etc., can solve the problems of different substrates, large differences in antenna radiation performance, and insignificant improvement of on-chip antenna gain and efficiency. , to achieve the effect of large bandwidth, good shielding effect and gain improvement
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[0032] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. However, it should be understood that the specific embodiments described here are only used to explain the present invention, and are not intended to limit the scope of the present invention. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concept of the present invention.
[0033] like Figure 1-3 As shown, the embodiment of the present invention provides a high-gain and high-efficiency on-chip antenna of a silicon-based process, including a silicon substrate, and M1 to M9 metal layers are arranged on the silicon substrate, and two rows of metal layers are arranged on the M9 metal layer. Two columns of array antennas, the array antenna includes four loop antenna...
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