Quartz tube mounting device and mounting method

Abstract

The invention discloses a quartz tube mounting device which comprises a mounting base, a support and at least two sliding mechanisms, the mounting base is arranged below the support, the sliding mechanisms are symmetrically arranged on the support, and the sliding mechanisms are used for supporting a quartz tube and achieving movement of the quartz tube along the support. The invention further discloses an installation method of the quartz tube. The installation device is adopted for installing the quartz tube. The device has the advantages of being low in cost, time-saving and labor-saving in installation, low in labor intensity and the like, and the quartz tube can be safely and reliably installed in the furnace body.

Description

technical field [0001] The invention mainly relates to the production technology of solar cells, in particular to a quartz tube installation device and installation method. Background technique [0002] Solar energy is an inexhaustible clean energy on the earth. Cells can convert solar energy into electrical energy, so they have broad market prospects. Silicon wafers are processed into solar cells after several processes, among which diffusion and surface coating processes It is the core process in the process of solar cell processing. During the production process of photovoltaic cells, the diffusion, annealing and surface coating processes are respectively completed in the diffusion furnace, annealing furnace and tubular PECVD equipment. Their reaction sites are all inside the reaction chamber, and the quartz tube is one of the core components of the reaction chamber. [0003] The existing tubular PECVD uses a quartz tube as a deposition chamber, uses a resistance furnace...

AI Technical Summary

Problems solved by technology

[0003] The existing tubular PECVD uses a quartz tube as a deposition chamber, uses a resistance furnace as a heating body, and inserts a graphite boat that can place multiple silicon wafers into the quartz tube for deposition. In order to improve the production efficiency of cells, reduce the number of tubes The occupied area of ​​type PECVD, the tube type PECVD in the prior art adopts multi-tube structure, usually includes 4-6 tube bodies, and multiple tube bodies are arranged along the vertical direction, and the height usually exceeds 3 meters, so install the 3rd tube It is very difficult to install manually when the pipe body is above or above. The installation process requires at least 4 people to lift the quartz tube and install it with the help of a ladder. It is difficult to lift the quartz tube and step on the ladder to walk steadily. The quartz tube itself is relatively fragile, and it is easy to cause the quartz tube to collide with the frame of the clean bench during the collaborative installation process, which can easily cause damage to the quartz tube and greatly affect the production cost.

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