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Coating material storage device, vacuum coating equipment and vacuum coating method

A storage device and vacuum coating technology, applied in vacuum evaporation coating, metal material coating process, sputtering coating, etc., can solve the problem of high cost and achieve the effect of improving coating efficiency and coating effect

Active Publication Date: 2022-04-08
广东省新兴激光等离子体技术研究院 +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In technical solutions such as the above, it has played a certain positive role in solving the pollution of coating materials, but there are defects of high cost, and it is difficult to achieve the effect of completely eliminating pollution.

Method used

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  • Coating material storage device, vacuum coating equipment and vacuum coating method
  • Coating material storage device, vacuum coating equipment and vacuum coating method
  • Coating material storage device, vacuum coating equipment and vacuum coating method

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Embodiment Construction

[0055] Embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present application, and are not construed as limiting the present application.

[0056]Those skilled in the art will understand that unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the wording "comprising" used in the description of the present application refers to the existence of the stated features, integers, steps, and operations, but does not exclude the existence or addition of one or more other features, integers, steps, and operations.

[0057] Those skilled in the art can understand that, unless otherwise d...

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Abstract

The invention relates to a coating material storage device, vacuum coating equipment and a vacuum coating method, and the coating material storage device comprises a sealing chamber connected with a vacuum chamber and used for placing a coating material used for coating of the vacuum coating equipment; the vacuum valve is arranged at the joint of the sealed chamber and the vacuum chamber and is used for communicating or separating the sealed chamber and the vacuum chamber; the driving device is connected with the vacuum valve and used for driving to open or close the vacuum valve; the control device is connected with the driving device and is used for controlling the driving device to open the vacuum valve in the coating process and close the vacuum valve after coating so as to perform sealing protection on the coating material in the sealing chamber; according to the technical scheme, the coating material in the sealing cavity is prevented from being in contact with air to react or be adsorbed and polluted, the purity of the coating material is guaranteed, the coating material does not need to be cleaned frequently in the coating process, the coating efficiency is improved, and the coating effect is also improved.

Description

technical field [0001] The present application relates to the technical field of vacuum coating, in particular to a coating material storage device, vacuum coating equipment and a vacuum coating method. Background technique [0002] Vacuum coating technology is widely used to improve the characteristics of original workpiece materials and enrich their functions. Its main technology is to deposit functional films such as metals, alloys, oxides or compounds on the surface of materials by using magnetron sputtering, resistance evaporation coating, electron beam evaporation coating and other technologies under vacuum conditions to improve material performance. [0003] In the vacuum coating equipment with a single chamber, the coating material is generally made into a target or film material first, and then placed in the coating material chamber for use; since the vacuum coating equipment needs to turn on the vacuum after each coating process The workpiece is taken out of the c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56
Inventor 刘玮朱昆曹健辉陈惠君颜学庆刘晓兰
Owner 广东省新兴激光等离子体技术研究院
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