Miniature weak charged particle beam detection device

A charged particle beam and detection device technology, applied to measuring devices, circuits, discharge tubes, etc., to achieve the effects of low production cost, compact structure, and high detection accuracy

Pending Publication Date: 2022-04-15
FUDAN UNIV
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Problems solved by technology

[0003] At present, it is difficult to directly measure the beam intensity of charged particles less than the picoampere level by conventional methods, so there is an urgent need for a detection device that can measure the beam intensity of charged particles in the picoampere level

Method used

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  • Miniature weak charged particle beam detection device
  • Miniature weak charged particle beam detection device

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Embodiment Construction

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0030] A miniature weak charged particle beam detection device, its structure is as follows figure 1 and figure 2 As shown, it includes: vacuum connection support 5, electron suppression pole 1, beam current absorption pole 2, signal amplification pole 3 and signal absorption pole 4, wherein:

[0031] The vacuum connection support 5 is used to install the fixed screw of the probe and the vacuum electrode interface to provide vacuum sealing;

[0032] The...

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Abstract

The invention relates to a miniature weak charged particle beam detection device, and the device comprises an electron suppression electrode which is used for suppressing secondary electrons; the beam absorption electrode is used for absorbing the charged particle beam; the signal amplification electrode is used for generating secondary amplified electron flow; the signal absorption electrode is used for detecting and absorbing the total amplified current signal; the electron suppression electrode, the beam absorption electrode, the signal amplification electrode and the signal absorption electrode are sequentially arranged in the head-on charged beam direction, and the working environment of the detection device is a vacuum environment. Compared with the prior art, the method has the advantages of high detection precision, low production cost, easiness in processing and the like.

Description

technical field [0001] The invention relates to the technical field of charged particle detection, in particular to a miniature weak charged particle beam detection device. Background technique [0002] Pulsed charged particle beams can be divided into pulsed electron beams and pulsed ion beams. Pulsed charged particle beams have been widely used in the fields of material surface modification, nuclear physics and nuclear technology, plasma physics, aerospace and other fields. The measurement of the current density distribution of the pulsed charged particle beam is very important in many applications. In the prior art, the measurement of the current density distribution of the charged particle beam generally adopts the mechanical scanning method, the color changing film method, the scintillator photoelectric method, and the flat electrode array etc. [0003] At present, it is difficult to directly measure the beam intensity of charged particles less than the picoampere leve...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01T1/29H01J47/00
Inventor 黄良玉王银涛牛犇何贞岑江紫环刘佳林傅云清姚科
Owner FUDAN UNIV
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