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Touch screen base material with transparent electroconductive film

A technology of transparent conduction and transparent substrate, which is applied to the conductive layer on the insulating carrier, electrical digital data processing, metal material coating technology, etc., and can solve problems such as difficult-to-touch screens and difficult-to-process tin oxide films

Inactive Publication Date: 2004-03-31
NIPPON SHEET GLASS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is a problem that it is extremely difficult to process a tin oxide thin film in an electrode forming process, and specifically, it is difficult to process a touch panel with a precise touch switch function using a tin oxide thin film

Method used

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  • Touch screen base material with transparent electroconductive film
  • Touch screen base material with transparent electroconductive film
  • Touch screen base material with transparent electroconductive film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0063] ZnO, In 2 o 3 , SnO 2 The powdered reagents were mixed with each other in a certain ratio with a mortar to obtain the composition shown in Table 1. These powder mixtures are cold pressed into compacts, and the compacts are sintered to obtain sputtered screens. The sintered screen was used to deposit films on glass plates by DC magnetron sputtering over a period of time to obtain the film thicknesses shown in Table 1. As a result, a substrate having a transparent conductive film having a surface resistance of 1,600Ω / □ and a transmittance of 94% was obtained. In other words, the film-coated substrate is very transparent while retaining the desired resistance value.

Embodiment 2 to 6

[0065] The method of attaching the transparent conductive film to the glass plate is the same as that of Example 1 except that the composition of the screen electrode is changed. As shown in Table 1, the samples thus obtained had moderate surface resistance ranging from 500 to 5,000Ω and transmittance of 90% or higher, respectively. The samples obtained in Examples 1 to 6 each combined high transmittance, moderate surface resistance, and satisfactory processability in electrode formation, and were particularly preferable samples of the substrate according to the present invention. These samples were rated as ⊚ in the comprehensive evaluation.

Embodiment 7 to 10

[0067] The method of attaching the transparent conductive film to the glass plate is the same as that of Example 1 except that the composition of the screen electrode is changed. As shown in Table 1, the samples thus obtained each had a transmittance of 91%. However, the surface resistances of the samples obtained from Examples 7, 9 and 10 were 320Ω, 220Ω and 390Ω, respectively, which are slightly lower than the lower limit of the moderate resistance range shown above. It can be found that although the effect is slightly inferior in terms of energy saving, the ON / OFF operation can be effectively performed without failure. On the other hand, the sample obtained in Example 8 had a transmittance of 92%, which was not lower than that of glass, and a surface resistance of 9,800Ω, which was slightly higher than the upper limit of the moderate resistance range shown above. However, this sample was able to ensure electrical connection when the transparent electrodes were in contact i...

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Abstract

A transparent touch panel substrate comprising a transparent substrate and deposited thereon a transparent conductive metal oxide film which contains zinc, indium, and tin as metallic elements and is soluble in acids. The transparent conductive metal oxide film preferably contains zinc in an amount of from 40 to 65 atomic % based on all metals and contains indium in an amount of from 0.25 to 1.3 times the amount of tin on an atomic basis. The film preferably has a thickness of from 100 to 160 nm. The touch panel substrate of the invention combines three properties: high light transmittance; ease of processing in forming a transparent electrode by acid etching; and the transparent conductive film has a moderate sheet resistance of from 500 to 5,000 OMEGA.

Description

technical field [0001] The invention relates to a transparent touch screen base material and a transparent touch screen using the base material. Background technique [0002] Indium oxide (hereinafter referred to as ITO) containing 3% to 10% by weight of tin oxide, which is used as a transparent electrode in a liquid crystal display, is widely used for a transparent electrode formed on a transparent substrate of a transparent touch panel because it is Transparent and can be easily processed during electrode formation. Transparent conductive tin oxide films are also used as transparent electrodes for touch screens due to their satisfactory transparency. [0003] The composition of the transparent conductive ITO film used in liquid crystal displays is designed so that the film has as low resistance (resistivity) as possible. Thus, the conventional transparent conductive film has a problem that its resistance is so low as will be described later that the film is not suitable ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/08B32B17/10C23C14/34C23C14/35G06F3/041G06F3/045H01B5/14
CPCB32B17/10174B32B17/10018G06F3/045H01B5/14
Inventor 丰岛隆之新井大介安崎利明荻野悦男
Owner NIPPON SHEET GLASS CO LTD