Particle counter metering method, device and equipment and storage medium

Abstract

The invention discloses a particle counter metering method, device and equipment and a storage medium, and the method comprises the steps: obtaining a particle scattered light signal of particles in to-be-detected gas passing through a photoelectric sensor measurement cavity in a preset collection period through a photoelectric detector in a photoelectric sensor, and converting the particle scattered light signal into a particle scattered light current; the particle scattered light current is converted into voltage pulse signals through amplification filtering processing, the voltage pulse signals are counted through a counting channel of a particle counter, and actual channel particle measurement data are obtained; and taking the sum of the difference values of the actual channel particle measurement data on all the same counting channels and the locally pre-stored system channel noise data values as the real particle measurement data. According to the method and the device, the difference value between the actual particle measurement data detected by the particle counter and the pre-stored system noise data value is taken as the actual particle measurement data, so that the system noise of the particle counter can be effectively reduced, and the counting accuracy of the particle counter is improved.

Description

technical field [0001] The present application relates to the field of metering technology, in particular to a particle counter metering method, device, equipment and storage medium. Background technique [0002] At present, in order to avoid product failure caused by particle pollution in the production process, the production fields such as pharmaceutical preparation, semiconductor, optics or precision machining have increasingly stringent requirements for environmental cleanliness. In order to know the situation of particles in the air of the production environment, particle counters Applications in the above fields are essential. The working principle of the particle counter is based on the principle of Mie scattering. The scattered light of the detected particles is output as a photocurrent through the photodetector, and then amplified and filtered by the amplifier circuit to convert it into a voltage pulse signal, and then obtained by the comparator for each channel. ...

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Problems solved by technology

[0003] However, due to the existence of particle counter system noise (such as power supply noise, circuit board noise, etc.), the measurement results of particles in the air of the production environment are prone to errors

For example, after the particle counter converts the photocurrent of particle scattered light into a voltage pulse signal, technicians usually count by setting the counting threshold in the particle counter, such as when the amplitude or width of the voltage pulse signal exceeds the set The threshold signal is counted. This one-size-fits-all counting method will virtually miss the particles below the threshold and miscount the system noise signal above the threshold. For example, a particle counter that can accurately measure 0.3 micron level, when When there are 0.1 micron and 0.2 micron particles in the system, the system will still obtain a signal within its performance range, but since the amplitude of this signal may be similar to that of the noise signal, the system cannot identify whether the signal is a particle signal or a noise signal

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